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Newly Formed Diagnostic Data Acquisition (DDA) Task Force in China

By Sara Ma (SEMI China), Clare Liu (Kxware)

Given the surging demand for big-data analytics in advanced nodes, establishing a dedicated task force has become an industry priority. Since Clare introduced the concept of DDA/EDA at a seminar in 2025, this idea has rapidly gained momentum in the semiconductor industry. Investigations have shown that virtually all advanced process nodes in the Chinese mainland are discussing the standard requirements for EDA. Inspired by this, the China Information and Control Technical Committee members voted at the spring standards committee meeting in June 2026 to establish a “Diagnostic Data Acquisition Task Force” under the Information & Control (I&C) China Chapter of Technical Committee.

In the early 2000s, the continued advancement of automation in semiconductor manufacturing facilitated a paradigm shift from 200 mm batch-based production control to 300 mm wafer-level processing. This transition not only endowed fabs with the capability for real-time data analytics and in-situ process intervention, but also imposed more rigorous demands on data fidelity, thereby creating an imperative for high-precision, high-frequency data acquisition.

Limitations in GEM-Based Data Collection

  • The shared communication channel between data collection and equipment control constrains the maximum trace data rate, which is typically fixed in order to preclude any adverse impact on tool performance.
  • Data acquisition is event-triggered, aligned predominantly with substrate movement events and recipe start/stop milestones.
  • Most collected data is primarily used for material tracking, OEE reporting, and batch level FDC (Fault Detection and Classification) and R2R (Run to Run) control.
  • Modifications to the factory's data collection configuration are subject to stringent change management procedures, making modifications cumbersome and time consuming.
  • Equipment data is stored in a flat format, lacking hierarchical context or structural information about the tool configuration.

Escalating Requirements from Process Engineering for Enhanced Data Capabilities

Higher sampling rates are needed to capture critical process instants or detect subtle anomalies.

  • Engineers require more flexibility in defining data collection scopes and conditions, rather than relying on post-collection filtering and categorization at the factory level.
  • A more flexible and convenient data acquisition approach is essential — one that operates independently without interfering with production control or tool performance.

To clearly distinguish their roles, the SEMI standard suites are generally categorized as follows: the SEMI SECS/GEM standard primarily handles basic communication and control, with core functions including protocol and connectivity, message and data processing, and behavior and scenario control (key standards include SEMI E4, E37, E5, and E30). The GEM300 standard mainly handles 300mm automation expansion, covering process and control, material handling, and performance and tracking functions (primarily E40, E94, E87, E90, and E116). For EDA/Interface A, the major focus is on high-volume, high-velocity data acquisition, with key standards including E120, E125, E132, E134, and E138.

In short, the purpose of EDA standards is to facilitate and improve communication between data acquisition software applications and equipment in a factory. It does not replace existing SEMI GEM/SECS or GEM300 standards but rather provides a parallel communication channel focused on high-speed, high-capacity data acquisition. GEM/SECS and GEM300 are primarily responsible for device control and configuration, while EDA focuses on data acquisition.

The task force held its first meeting before the TC Chapter meeting at the end of May. Attendees included representatives from AMEC, Kxware, DGIS, AMIES, and Cimetrix, who all expressed strong expectations that implementing SEMI Information & Control core standards could build an efficient collaboration bridge between equipment and factories. The group reviewed and fixed the charter and scope of this Task Force. After the TC Chapter approved the task force, the DDA TFOF (Task Force Organization Form) has been uploaded on the SEMI website.

Charter

  • Investigate the problems in the implementation of Equipment Data Acquisition (EDA)/Interface A related standards in the Chinese region and propose suggestions for standard improvement.
  • If necessary, formulate new SEMI standards related to EDA/Interface A and diagnostic application.
  • Promote cooperation with the task forces in China and other regions involving EDA/Interface A and data infrastructure and strive to reach a consensus.

Scope

  • The support and improvement of the EDA/Interface A standard suite is the main focus of the DDA Task Force.
  • Promoting the application of EDA/Interface A standards in the Chinese region is one of the tasks of the DDA Task Force.
  • The DDA Task Force may propose new standards or updates as needed to achieve improvements.
  • Cooperating with other task forces in China and other regions to jointly promote the application and improvement of EDA/Interface A standards.

This Task Force was established based on the recognition that standardizing Diagnostic Data Acquisition is particularly important.

The TF community page has been set up on the Connect@SEMI platform. Click “Join” to participate in this TF's activities. You must be a SEMI Standards Program member to access any Standards-related activities on the platform. To join, refer to Get Involved below.

How to Search

Go to “Communities” (navigation bar in Connect@SEMI) > Standards Task Forces > Diagnostic Data Acquisition Task Force China > Join Community.

If you are interested in joining the task force, please contact SEMI Staff.

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at www.semi.org/standardsmembership. For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

 

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August 20, 2026