Major Revision Underway for SEMI E142 

By Michelle Sun, SEMI HQ

SEMI E142, Specification for Substrate Mapping, defines data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays. Developed by the Advanced Backend Factory Integration (ABFI) Task Force of the Information & Control Technical Committee, SEMI E142 is designed to work in conjunction with other SEMI Standards to exchange substrate map data through a SECS/GEM interface, which is described by SEMI E5/E30.

To locate failure points, a two-dimensional XY coordinate map is generated for substrates. However, some steps in the semiconductor manufacturing process may use their own XY coordinate systems. For example, the wafer XY coordinates in wafer test data depend on the prober and recipe combination and probably does not match the E142 XY coordinate system.  

Because assembly tools have no knowledge of wafer XY coordinates other than those defined by the E142 standard XY coordinate system, alignment of XY coordinates is critical for single device tracking from the wafer through assembly to final test.  Document 7381 proposes to add a new Subordinate Standard to SEMI E142 that will define an infrastructure to map a non-E142 wafer XY coordinate system to and from the E142 Standard XY coordinate system. 

The Task Force plans to ballot the document during Cycle 7 (August 19 to September 18) and adjudicate the ballot at SEMICON West in October.

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

Standards Watch
SEMI
www.semi.org
April 16, 2026