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Vacuum Pump Suppliers Call for Participation

By Andreas Kloeppel, Applied Materials and Benjamin Gross, Applied Materials

 

Environmental Performance Rating Task Force encourages vacuum pump suppliers to join SEMI’s Environmental Performance Rating (EPR) Task Force (TF) to develop a method for rating environmental performance of certain components used in semiconductor manufacturing. As the first component, the TF is targeting vacuum pumps as they are a major energy consumer in the semiconductor manufacturing equipment.

The TF aims to define a fair and transparent system that will simplify the comparison of equivalent energy efficiency and promote that efficiency during equipment selection. To provide an application-specific EPR method for the components, the TF is preparing a set of test conditions representing typical applications of the vacuum pumps. This method is planned to become a recommendation in a Related Information Section in SEMI S23-1021E, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment.  Other components might be described here in future as well. Success and application of EPR methods throughout semiconductor industry will also depend on a broad consensus within the component supplier landscape.

Therefore, the EPR TF is encouraging pump suppliers to become members of the TF and share their perspective on the EPR method for vacuum pumps. The TF meets virtually, thus physical presence is not required. If you are interested in participating, please contact Kevin Nguyen [email protected].

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

 

Standards Watch
SEMI
www.semi.org
September 12, 2024