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Energy Efficiency Standards Initiative

By Nick Chen, SEMI Taiwan

The importance of sustainability and renewable energy has been a popular topic in recent years. However, as we look into new energy options, it is crucial to consider how we currently use energy and how efficiently we utilize it. It is estimated that a typical semiconductor fabrication facility, or fab, consumes as much power annually as approximately 50,000 households. In fact, larger "megafabs" can use more electricity than automotive plants and refineries. The power consumption per unit area of a wafer varies with technological advancements and the complexity of the manufacturing process. Global energy consumption per unit area of wafers increases by 5-10% annually, which is influenced by production efficiency and the global economic climate.

Therefore, how much electricity can be efficiently transferred into wafer manufacturing is crucial, and the key lies in energy efficiency. Recently, TSMC, the semiconductor fabrication giant, led a consensus meeting on energy efficiency standards initiatives, where several key market players, including SAHTECH, ITRI, and Handbell, also participated. The current SEMI S23-1021E2 standard, (Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment), was discussed, and the members sought opportunities to add new content related to energy efficiency within the S23 standard. The idea of modularizing the parameters in the S23 standard was mentioned during the meeting, focusing on the electrical and water sections. By modularizing, key components can be defined, allowing for comparisons between different equipment and further addressing the issue of power consumption discrepancies. The summary of the consensus meeting highlighted four topics as goals for future work.

  • Update and Enhance Existing Machine Energy-Saving KPIs
  • Develop New Energy-Saving KPIs (For example: energy efficiency of manufacturing equipment)
  • Integrate System KPIs (Focus on the overall energy-saving performance of the system, not just the energy efficiency of individual machines.)
  • End-User Impact on Machine Overdesign (Often, individual machines meet standards, but improper use by the end-user, such as exceeding SEMI standard by 20 times, leads to machine overdesign.)

We are optimistic about the development of new standards and the revision of existing ones. The energy efficiency standard empowers the semiconductor industry to produce more wafers with less energy, paving the way for a sustainable, green, and bright future for the next generation.

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

 

Standards Watch
SEMI
www.semi.org
September 12, 2024