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Standards Ready for the Next 50 Years

By Paul Trio, Director, Standards, SEMI

2022 has been yet another busy but exciting year for SEMI Standards. Last year alone, we held over 80 Standards meetings, formed nine new Task Forces, initiated over 85 new activities, and approved over 120 ballots. More importantly, all of this flurry of activities have led to the publication of 19 new standards as well as 45 critical revisions to existing documents.

The following are the new SEMI Standards published in 2022:

  • SEMI C104 - Guide for Reporting Performance Parameters of the Polymer Windows for Chemical Mechanical Planarization (CMP) Pads Used in Semiconductor Manufacturing
  • SEMI E132.2 - Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)
  • SEMI E187 - Specification for Cybersecurity of Fab Equipment
  • SEMI E188 - Specification for Malware Free Equipment Integration
  • SEMI E120.2 - Specification for Protocol Buffers for Common Equipment Model (CEM)
  • SEMI E125.2 - Specification for Protocol Buffers for Equipment Self Description (EqSD)
  • SEMI E134.2 - Specification for Protocol Buffers of Data Collection Management
  • SEMI E142.4 - Specification for SECS II Protocol for Substrate Mapping Using Item Transfer
  • SEMI F120 - Test Method for the Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas Systems
  • SEMI G98 - Specification for Coefficient of Thermal Expansion (CTE) of Encapsulation Materials for Wafer Level Packaging and Panel Level Packaging
  • SEMI G99 - Specification for Flowability of Encapsulation Materials for Wafer Level Packaging and Panel Level Packaging
  • SEMI G100 - Specification for Gel Time of Encapsulation Materials for Wafer Level Packaging and Panel Level Packaging
  • SEMI G101 - Specification for Modulus of Encapsulation Materials for Wafer Level Packaging and Panel Level Packaging
  • SEMI G102 - Specification for Shear Strength of Encapsulation Materials for Wafer Level Packaging and Panel Level Packaging
  • SEMI G103 - Specification for Viscosity of Encapsulation Materials for Wafer Level Packaging and Panel Level Packaging
  • SEMI G104 - Specification for Wettability of Encapsulation Materials for Wafer Level Packaging and Panel Level Packaging
  • SEMI M91 - Test Method for Determination of Threading Screw Dislocation Density in 4H-SIC by X-Ray Topography
  • SEMI MS14 - Guide for Critical Parameters of Gas Sensors
  • SEMI T24 - Specification for ID Marking for Glass Carrier Characteristics of Panel Level Packaging (PLP) Applications

Updates were also made to existing SEMI Standards and Safety Guidelines, including:

  • SEMI A2 - Specification for Surface Mount Assembler Smart Hookup (SMASH)
  • SEMI A3 - Specification for Printed Circuit Board Equipment Communication Interfaces (PCBECI)
  • SEMI C93 - Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System
  • SEMI E5 - Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
  • SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
  • SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
  • SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services
  • SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment
  • SEMI E179 - Specification for Protocol Buffers Common Components
  • SEMI E181 - Specification for Panel FOUP for Panel Level Packaging
  • SEMI F57 - Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
  • SEMI M86 - Specification for Polished Monocrystalline c-Plane Gallium Nitride Wafers
  • SEMI T5 - Specification for Alphanumeric Marking of Round Compound Semiconductor Wafers

How to Access New and Existing SEMI Standards

SEMI Standards & Safety Guidelines are available for purchase either as Individual Downloads or through SEMIViews.

Single document downloads of SEMI Standards are available from the SEMI website. This is also the best place to see the full list of available SEMI Standards.

SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. New and revised Standards are automatically made available through the system ensuring you access to the latest documents. SEMIViews includes Standards in English (the official language) as well as selected Standards in Japanese, Traditional Chinese, and Korean. Try the free 30-day evaluation today!.

It is through the purchase of these products that helps fund our Standards Program enabling SEMI to provide this service for the benefit of the worldwide electronics design and manufacturing industries.

50 Years of SEMI Standards

This year marks the 50th anniversary of SEMI Standards. The first SEMI Standards Committee was formed in 1973 to address silicon wafer dimensional specifications. At the time, there was a proliferation of over 2,000 different wafer specifications, leading to major inefficiencies at a time when the industry was just getting underway. Wafer suppliers banded together under SEMI to solve this problem and rapidly developed consensus specifications for 2-inch and 3-inch wafers, and by the mid-1970s over 80% of wafers being shipped conformed to these new standards.

As we celebrate our golden anniversary, SEMI renews its commitment to serve our Program Members – our technical committees and task forces – in facilitating the development of critical standards for our industry.

We will be bringing our 50th year celebration in upcoming SEMI events across various regions. Stay tuned!

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

 

Standards Watch
SEMI
www.semi.org
March 16, 2023