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Help Improve SEMI E72 – The Equipment Footprint, Height, and Weight Standard

By Laura Nguyen, SEMI

As the semiconductor industry moves to smaller technology nodes, the equipment required to manufacture these advanced chips becomes more complex and specialized. As a result, the layout of the Fab floor and cleanroom (CR) also needs to be optimized to accommodate these changes.

To help semiconductor device manufacturers plan or retrofit their fabs, SEMI E72, Specification and Guide for Equipment Footprint, Height, and Weight, provides guidelines for the physical characteristics of semiconductor manufacturing equipment. Specifically, SEMI E72 specifies the equipment footprint, height, and weight requirements for semiconductor equipment.

Equipment suppliers need to know what limitations there are for equipment configurations and for moving equipment into facilities in order to design their products.

As the number and variety of equipment designs and configurations increase to support increasingly complex technology nodes, the types of fab layouts and cleanroom configurations also grows.

surveyEquipment suppliers are often required to accommodate dimensional limitations outside of what’s defined in SEMI E72. It is necessary to reexamine SEMI E72’s current “a single value fit all” approach and provide options as necessary.

The SEMI Standards E72 Revision Task Force is seeking guidance from the industry to better understand both current and future fab and equipment designs so that SEMI E72 can be adjusted as needed to accommodate, in addition to the dimensioning criteria to which any production equipment is required to be configurable in the current E72 SEMI Standard.

Since SEMI E72 is intended to help semiconductor device manufacturers plan or retrofit their fabs, providing information about practical dimensions of typical equipment types for newer generation technologies may also be considered in this revision activity.

Please take a few minutes to complete this survey and help guide the direction the outcome of this standard. The survey will be open for 30 days.

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact please contact Laura Nguyen or your local SEMI Standards staff.

 

Standards Watch
SEMI
www.semi.org
March 16, 2023