Environmental Performance Rating Task Force
By Kevin Nguyen, SEMI
The Environmental Performance Rating (EPR) Task Force was approved at SEMICON West 2022 to explore and develop a rating method for assessing the environmental performance of components used in semiconductor manufacturing.
The EPR Task Force is made up of representatives from major equipment suppliers, pump manufacturers, and end users. Participating companies include Applied Materials, ASML, Axcelis, Intel, Edwards Vacuum, KLA, Lam Research, Nikon, Pfeiffer Vacuum, Tokyo Electron, and many more.
Led by Ben Gross (Applied Materials), the EPR Task Force (TF) is chartered with developing a rating system for specific components , such as vacuum pumps which will be based partly on SEMI S23 - Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment.
The TF will also define a fair and transparent system that will simplify the comparison of equivalent energy efficiency and other elements of environmental performance across components manufacturers and encourage customers to consider this information when selecting equipment.
Although there was some confusion at first regarding the objective, which led to some challenging discussions, the EPR Task Force has since made good progress with a clear approach. All participants on the calls are supportive of the effort. The TF have already started working on a draft ballot for rating vacuum pumps and has plans mapped out as shown in the figure below.
If you would like to participate in this effort, the TF meets weekly/biweekly on Thursdays from 3:00-4:00 PM Pacific time via teleconferences. Please contact Kevin Nguyen at [email protected].
Get Involved
SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.
For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.
Standards Watch
SEMI
www.semi.org
March 16, 2023