Detecting the Detection Limits for Semiconductor Materials – The SEMI C10 Workshop at SEMICON West 2022 Hybrid
Establishing detection limits for materials in semiconductor manufacturing has long been a barrier to effective detection limit solutions despite decades of developmental efforts since the process is influenced by a variety of disciplines, often with conflicting interests.
The analytical chemist approaches it from a perspective of analytical science, the statistician from a statistical theory viewpoint, the regulator from a governance standpoint and the regulated in a way that reduces regulation costs. The instrument manufacturer is focused on selling products and the contract laboratory on pitching services.
This byzantine mix partly explains why conflicts abound.
At SEMICON West 2022 Hybrid, the workshop titled Detecting the Detection Limit – SEMI C10 Workshop will explore the journey of navigating the detection limit obstacle course, starting with a broad view of the problem focused on key detection limit concepts and limitations. The current version of SEMI C10 - Guide for Determination of Method Detection Limits sets out important and useful guidance for these concepts. The workshop will also examine natural biases and the application of detection limit standards since the application of the limits is where the standards succeed or fail.
The workshop will explore how applying SEMI C10 to detection limit procedures helps improve yields and manufacturing processes. Quality and analytical experts, statisticians and those involved with process metrics should attend.
Join us at SEMICON West 2022, Tuesday, July 12th at 10:00-11:00 AM Pacific. Registration is Required. There are no fees. If you are registering to attend the Workshop Virtually, please follow the same registration procedure (linked here) and we will email you the Dial-In information a week before the session.
About Tom Bzik
Tom Bzik works as a statistical consultant for EMD Electronics after a career at Air Products and Chemicals, Inc. He served as Chair of ASTM - E11 Quality and Statistics, which manages an extensive portfolio of international statistical standards, from 2018-2021. He chaired the Statistical Methods Task Force in SEMI International Standards for over 20 years and is co-chairing its restart. Bzik has taught at several universities including his alma mater, the University of Connecticut. He was the keynote speaker at the ASTM Symposium for Detection Limits in 2018. Bzik has published many papers and presentations with a focus on properly handling the unique data characteristics of trace contamination data.
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June 15, 2022