Overview on SEMI S2 Tutorial Seminar
By Hidetoshi Sakura, SEMI Japan Region EHS Technical Committee co-chair and S2 Overview Seminar Program Chair, NuFlare Technology, Inc.
In this seminar, SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, which provides a set of performance-based environmental, health and safety (EHS) considerations for semiconductor manufacturing equipment, is to be explained in detail. With SEMI S2, participants can gain knowledge on some of many international codes, regulations, standards, and specifications that should be considered when designing semiconductor manufacturing equipment.
The SEMI EHS Guidelines hierarchy is shown above. There are ten guidelines referenced by SEMI S2 including SEMI S8, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment. With this structure, appropriate revisions can be made independently specific to each referenced guidelines in a timely and appropriate manner. In particular, SEMI S8, is essential for end users to keep safe working environments for semiconductor manufacturing factories.
SEMI S2 includes 28 sections, Appendix, and Related Information as above. This seminar will be delivered as pre-recorded sessions developed by specialists in key areas including electrical, mechanical, chemicals, fire protection, environmental considerations, and radiation.
Although not directly referenced by SEMI S2, various kinds of EHS guidelines have been developed reflecting user needs in the field, including SEMI S23, Guide for Energy, Utilities, and Materials Used by Semiconductor Manufacturing Equipment, and SEMI S30, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes.
This seminar reflects changes in SEMI S2-0821, including section 23 and section 14 with focus on key portion of changes.
We look forward to your continued business with SEMI EHS Guidelines.
SEMI Tutorial SEMI S2 Overview Seminar
Application begins June 2022.
Video distribution begins August 2022.
Member companies’ fee: 25,300 yen per person (including tax)
General fee (non-member companies, per person): 50, 600 yen (including tax)
* Above planned information is subject to change in the future.
The following link provides latest information on the SEMI S2 Overview Seminar.
If you need further information or would like to participate in standard activities on SEMI Japan region EHS Technical Committee, please contact;
Mami Nakajo, SEMI Japan Standards & EHS Department
Email: [email protected]
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For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.
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June 15, 2022