Newly Formed Equipment Data Publication Task Force

Newly Formed Equipment Data Publication Task Force

By Shuba Viswanath, Task Force Leader, Intel

Big Data from equipment including subcomponents (such as chillers etc.), is critical for IDMs to perform offline and online analysis.

IDMs are having to deal with a growing number of complex process and yield issues requiring correlation of equipment data with other process related data for analysis. There are limitations with the current data that is made available from the equipment today. For example, rich amount of data is being generated by running customer wafers through the equipment, but the end customers have access to a small subset only. Led by Intel and Samsung, the Equipment Data Publication (EDP) Task Force (TF) was approved by the Information & Control North America Technical Committee Chapter.

This TF is chartered to provide:

• Data definition and classification of equipment and subcomponent data (for example, process data and health data).
• Definition of minimum set of equipment and subcomponent data that can be acquired to support offline analysis such as early excursion detection/prevention. Identify existing standards related to how the equipment and subcomponent data content can be acquired (e.g., SECS/GEM, EDA/Interface A, Sensor Bus, etc.)
• Identifying existing standards related to how the equipment and subcomponent data content can be acquired (e.g., SECS/GEM, EDA/ Interface A, Sensor Bus, etc.)

Based on the discussion among TF members, the goal is to develop and manage standards related to defining what classes of data will be required from equipment and subcomponents, with focus on data content and access to end customers with input from device makers, equipment suppliers, and software vendors. IDMs and equipment suppliers are needed to join this critical effort. If you would like to participate in this TF, please contact TF Leaders Shuba Viswanath at [email protected] and Jaeyong Park at [email protected].