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Flammable Gas Task Force

By Kevin Nguyen, SEMI

 

dec2022-article-ehsAs semiconductor manufacturing equipment become more complex in meeting the demands of high volume manufacturing, the use of oxygen, hydrogen, and other flammable gases need to be addressed. For example, emissions of flammable or combustible chemistries during operations must be controlled to mitigate fire risk.

The current version of SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment has safety measures for flammable gas in place. However, these measures should be clarified and improved.

The Flammable Gas Task Force (TF), also known as the Hydrogen Safety TF, was authorized to draft document 6980, Line-Item Revision to SEMI S2-0821, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment.

The TF plans to clarify precautions in SEMI S2 for a flammable gas present in a semiconductor manufacturing equipment. The TF will also look into whether the ignition can be prevented by sufficient dilution in an ignitable atmosphere.

In addition, the TF will add a Related Information section for design approach for semiconductor equipment and bring awareness on worldwide standards and regulations including:

  • Safety requirements
  • Flow chart on how to determine the Atmospheres Explosible (ATEX) zone
  • Country specific interpretation
    • Use of the IEC-EX (System for Certification to Standards Relating to Equipment for use in Explosive Atmospheres) standards
    • Requirement of countries requiring country specific components

Major equipment suppliers have joined this critical effort. The TF meets every Thursday via teleconference. If you would like to participate in this TF, please reach out to Kevin Nguyen at [email protected].

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

 

Standards Watch
SEMI
www.semi.org
December 9, 2022