RF Generator Power Measurement Standard Updated
By Michelle Sun, SEMI
Initially developed in 2004, SEMI E136, Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery, describes the testing procedures and equipment required for determining the true output power of RF generators in RF power delivery systems. This is a key component of the performance criteria for RF reliability and repeatability outlined in SEMI E113, Specification for Semiconductor Processing Equipment RF Power Delivery Systems.
While the current version provides a procedure for equipment setup and calorimeter calibration for determining RF generator output power, there are several possible sources of error in a flow calorimeter which need to be considered during the testing process. Moreover, it does not adequately address uncertainty to the degree needed to support SEMI E113. The revision provides additional information on the calibration process, allowing users to better understand different contributors of error and estimate uncertainty while accounting for such errors. The purpose is to help users produce lower uncertainty measurements of RF power with clear and traceable statements of uncertainty.
Another major addition to the Standard is the description for calibrating feed-through power sensors using a calorimeter to measure RF output power. While measurement of RF generator output power at the generator site is recommended, the transportation and setup of a calorimeter on the fab floor where RF generator is located can be impractical at times. By following this procedure, users can make generator power measurements in accordance with SEMI E136 much more quickly.
The ballot for this document was issued for voting in Cycle 5 of 2021 and was approved at the North America Metrics Technical Committee Chapter Meeting on August 4, 2021. The document will be submitted to the International Standards Committee Audits and Review Subcommittee for final review.
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September 2, 2021