New ATE Standard Passes the Test
By James Amano, SEMI
As with other segments of semiconductor manufacturing, semiconductor test is increasingly utilizing data for real-time analysis and real-time ATE input and control, to improve test yield, throughput, efficiency, and product quality. This is in turn fueling the popularity of an evolving class of services used for both overall equipment efficiency and yield operations. However, test equipment and test operations around the world use a diverse range of data formats and interface specifications, which means that solutions to enable compatibility between tools and test equipment incur significant service and application engineering costs for ATE vendors, OSAT companies, and software providers.
The Tester Event Messaging for Semiconductors (TEMS) Task Force, led by Teradyne, was formed in 2019 to mitigate these challenges. Their first major milestone is the successful development of SEMI A4, Specification for the Automated Test Equipment Tester Event Messaging for Semiconductors (TEMS), which was recently approved by the North America Automated Test Equipment (ATE) Committee and will be published soon. This new Standard establishes a vendor-neutral method to collect test cell data by standardizing ATE data messaging systems based on industry-standard internet communication protocols between a test cell host and a server.

SEMI A4 is designed to co-exist with current implementations of the different communication methods and allow for easy implementation of client-server-based functionality services for ATE operations.
Development of a subordinate Standard is also underway. Document 6581, New Subordinate Standard: Specification for HTTP JSON Protocol Implementation for the Automated Test Equipment Tester Event Messaging for Semiconductors (TEMS), intends to create an implementation of SEMI A4 that utilizes HTTP JSON Protocols. This ballot was recently issued for voting in Cycle 2 of 2021 and will be reviewed at the Spring 2021 North America ATE Committee meeting.
The TEMS activity originated in the SEMI Collaborative Alliance for Semiconductor Test (CAST) before successfully transitioning to the Standards Program. The goal of CAST is to develop, coordinate, and direct all SEMI services for the semiconductor test community. In addition to the TEMS activity, additional Standards efforts that have been initiated out of CAST include Rich Interactive Test Database (RITdb) and Chip ID and Traceability. The RITdb activity is developing a more efficient and flexible format to manage big test data, while Chip ID and Traceability is developing a standardized approach for enabling traceable die-level identification (ID) throughout the IC manufacturing, test, and assembly processes to the point of use in the final system.
While the Standards Program has historically focused on the front end, the blurring of divisions between manufacturing segments means more tools will require data connectivity, which will require new Standards. Multiple Task Forces are at work on finding consensus solutions to benefit the industry – get involved now!
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Standards Watch
SEMI
www.semi.org
March 11, 2021