Overview of SEMI S2 Tutorial Seminar
By Hidetoshi Sakura, SEMI Japan Region EHS Technical Committee co-chair and S2 Overview Seminar Program Chair, NuFlare Technology, Inc.
In this Seminar, SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, which provides a set of performance-based environmental, health and safety (EHS) considerations for semiconductor manufacturing equipment, is to be explained in detail. SEMI S2 provides details about international codes, regulations, standards, and specifications that should be considered when designing semiconductor manufacturing equipment.
The SEMI EHS Guidelines hierarchy is shown above. There are ten guidelines referenced by SEMI S2 including SEMI S8, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment. With this structure, appropriate revisions can be made independently specific to each referenced guidelines in a timely manner. In particular, SEMI S8, is essential for end users to keep safe working environments for semiconductor manufacturing factories.
SEMI S2 includes 28 sections, appendix, and related information as above. This seminar will be delivered as pre-recorded sessions developed by specialists in key areas including electrical, mechanical, chemicals, fire protection, environmental considerations, and radiations.
Although not directly referenced by SEMI S2, various kinds of EHS guidelines have been developed reflecting user needs in the field including SEMI S23, Guide for Energy, Utilities, and Materials Used by Semiconductor Manufacturing Equipment, and SEMI S30, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes.
We look forward to your continued business with SEMI EHS Guidelines.
SEMI Tutorial SEMI S2 Overview Seminar
- Application begins late June 2021.
- Video distribution begins August 2021.
- Member companies’ fee: 17, 500 yen per person (excluding tax)
- General fee (non-member companies, per person): 35, 000 yen (excluding tax)
Above planned information is subject to change in future.
Latest information on the SEMI S2 Overview Seminar link: click here.
If you need further information or participate in standard activities on SEMI Japan region EHS Technical Committee, please contact Mami Nakajo, SEMI Japan Standards & EHS Department, at [email protected].
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SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.
For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.
Standards Watch
SEMI
www.semi.org
June 3, 2021