Gas Sensors Document Under the MEMS Standards Committee is Out for Ballot
By Laura Nguyen, SEMI
As with many emerging technologies, miniaturized gas sensor makers today do not conform to specific or well understood standards, whether it is with regards to parameter definitions, testing methods, reliability requirements, packaging, pin configurations, communication interfaces, etc., to name a few.
Given the state of technology evolution and the markets in this space, the timing is right for a set of defined standards regarding gas sensors.
The MEMS and Miniaturized Gas Sensing Task Force, birthed from the SEMI MSIG Device Working Group, envision that not only will this encourage the important players to focus on innovation, but also contribute to quicker adoption in application areas where customization from the ground-up can often be a barrier to commercial success. An example of such a barrier, is the difficulty for customers today to compare different gas sensors, or to use multiple devices within a single platform to sense different environmental gases.
The MEMS and Miniaturized Gas Sensing Task Force of the MEMS/NEMS North America Technical Committee Chapter will focus on the following MEMS and miniaturized gas sensing topics:
- Key parameters and their definitions,
- Test methodologies and test conditions to measure and report these parameters,
- Interface standards for communication with external world and/or other MEMS devices,
- Packaging, and
- Reliability requirements, definitions, and test methods.
SEMI Draft Document 6746, Guide for Critical Parameters of Gas Sensors, will be the start of many standards to come. This Guide describes a core of set of parameters that characterize a gas sensor and allow a data-driven comparison of gas sensor products for purposes of assessing suitability in end systems.
The Task Force has recently completed work on its ballot, which was issued in Cycle 5 of 2021. Make sure your company influences the development of Standards critical to the industry and vote today! Select Ballot Period "05-2021" and Ballot Committee "MEMS/NEMS".
To vote, you must be a SEMI Standards Program Member. Free to join, register here at: www.semi.org/standardsmembership.
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Standards Watch
SEMI
www.semi.org
June 3, 2021