Energy-Saving Equipment Communication Webinar in Korea
By Natalie Shim, SEMI Korea
In recent years, energy savings are of high importance to our industry. Towards this goal, multiple standards have been developed in the SEMI Standards Program to support energy saving communications in the fab. SEMI E175, Specification for Subsystem Energy Saving Mode Communication (SESMC), defines how process tools communicate with sub-fab equipment, such as vacuum pumps and gas abatement systems, can reduce utility consumption at times when wafers are not being processed by the tool, and returning to full performance when the tool is again required to process wafers. It builds on SEMI E167, Specification for Equipment Energy Saving Mode Communications (EESM), which defines communication between the fab host/ WIP controller and the process tools for the purpose of utility saving.
To share the value of these standards with local industry, SEMI Korea hosted an Energy Saving Equipment Communication webinar on April 29, 2021. Around 70 people from 38 different companies showed their interests and evaluated it positively. The Energy Saving Equipment Communication (ESEC) Task Force under the North America Information and Control Technical Committee played a great role in planning and presenting the webinar. Three speakers, Mike Czerniak (Edwards), Andreas Frenzel (DAS Environmental) and Andreas Neuber (Applied Materials), who are members of the ESEC Task Force helped make the webinar a success.
The webinar first explored why energy savings are so important, and how SEMI E175 achieves energy savings. Then, success stories of applying SEMI E167 to a typical burn wet abatement system followed. Finally, we looked at how these standards can be implemented in a semiconductor fab and what needs to be considered.
According to the post survey, many of the audience appreciated that the webinar provided new ideas for energy saving. In particular, the webinar was highly praised for being able to introduce practical information such as case study and implementation suggestions, not just introducing standards.
SEMI Korea will continue to hold webinars to share the status of notable SEMI Standard activities, including ESEC activities.
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SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.
For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.
Standards Watch
SEMI
www.semi.org
June 3, 2021