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New Standard on Specifications for Dimensions of Mass Flow Controller/Mass Flow Meter with EtherCAT® Control Protocol

By Mohamed Saleem, CTO, Brooks Instrument, and Laura Nguyen, SEMI

EtherCAT® communication is increasingly adopted as a preferred communication platform in semiconductor processing equipment. EtherCAT® Technology Group (ETG) has developed specification parameters for EtherCAT protocol for Mass Flow Controllers (MFCs) and Mass Flow Meters (MFMs). These include Power Connectors and EtherCAT RJ45 ports. EtherCAT is known for its high cycle time and cost-efficient cabling. The benefits of EtherCAT communication for MFCs include: (a) rapid reaction times to improve application efficiency (b) Virtually limitless network topology (c) Simplified and robust configuration, diagnostics and maintenance.

The principle of operation for EtherCAT communication for MFCs/MFMs is depicted in Figure 1.

EtherCAT Image revised

Figure 1. Principle of EtherCAT Communication

When the EtherCAT primary sends a telegram, it passes through each node as its moves downstream. Each local device then reads data and adds its data to the frame concurrently. This unique technology allows a local device node to receive and forward an EtherCAT message before the node processes the data which means the information can be transmitted at a much faster pace, reducing response time and making it the fastest industrial Ethernet technology1.

EtherCAT Technology Group (ETG)2 founded in 2003, is a global organization in which OEMs, End users and Technology providers collaborate and promote technology development pertaining to semiconductor processing equipment. ETG also fosters Technical Working Groups in which experts develop specific profiles and parameters for EtherCAT communication. Pertaining to MFCs, ETG TWG developed specific device profiles. ETG and SEMI agreed to standardize the dimension and location specification for EtherCAT ports and created a new SEMI Standard (SEMI E186)3 for the benefit of Semiconductor Equipment Companies and End Users. This standard refers to the dimensional and location aspects of EtherCAT MFCs. (ETG will continue to maintain all device parameters/profiles for EtherCAT MFCs.) The creation of the SEMI Standard was discussed at the ETG working level and SEMI Standards Mass Flow Task Force/Gases Technical Committee Chapter. A consensus was reached between ETG and SEMI that there is a definite benefit to the industry in creating a standard that specifies standard power connectors and EtherCAT port locations for all MFCs.

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For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff. 

REFERENCES

  1. Beckhoff, http://beckhoff.com/
  2. EtherCAT Technology Group Headquarters, Ostendstraße 196, 90482 Nuremberg, Germany; Telephone:+49 (911) 54056 20, Fax: +49 (911) 54056 29, EtherCAT.org.
  3. SEMI Standard E186; Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters.

 

Standards Watch
SEMI
www.semi.org
December 2, 2021