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MEMS Standard Successfully Driven to Publication by MSIG

By Laura Nguyen, SEMI HQ

 

No standards exist specifically for the substrates used to produce MEMS devices. While substrates used in the production of MEMS devices share many physical and electrical properties with those used in IC manufacturing, some significant differences exist. In order to achieve the mechanical features of various MEMS devices, particular substrate configurations may be required which differ significantly from substrates used in traditional semiconductor device fabrication. 

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The initial idea for this document was generated out of the MEMS and Sensors Industry Group (MSIG) before transitioning into the Standards Program. Since the integration of MSIG into SEMI the two groups have worked together on pulling together industry experts and last month have successfully published their first standard through this collaboration, SEMI MS12, Specification for Silicon Substrates Used in Fabrication of MEMS Devices.

SEMI MS12 includes information on physical properties such as dimensions and surface properties as well as basic electrical properties of customized silicon substrates (150 mm and 200 mm nominal diameter) to be used for MEMS device fabrication, and will allow the stocking of standard material, lowering the time to purchase, time to market and overall cost.


Get Involved

The next MEMS/NEMS Technical Committee meetings will be held in in conjunction with the North America Standards Spring 2020 Meetings, March 30-April 2. There is no cost to attend these meetings, but registration is required.

Make sure your voice is heard and your company influences the development of the SEMI Standards that are critical to the industry by becoming a SEMI Standards Program Member. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

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Standards Watch
SEMI
www.semi.org
March 5, 2020