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Newly Published Guide on Measurements of Openings and Vias in Glass

By Ilona Schmidt, Corning Incorporated

 

SEMI recently published a new standard SEMI 3D22, Guide on Measurements of Openings and Vias in Glass. With the emerging use of glass as a non-silicone, dielectric alternative for the semiconductor industry, through glass vias, blind vias, and openings in glass are coming into focus for passive or active devices. However, there are few – or no – agreed upon test methods for measuring the physical and dimensional properties of through glass vias or other openings in glass as all existing standards are based on silicon or opaque base materials. For instance, surface roughness of the openings is critical to the filling process, but to date, no relevant measurement standards exist. Alignment of patterns and structures in the process are also topic of the standard.

image for SEMI 3D22

This Guide will discuss existing test methods for openings and propose new ones for openings in glass.

This Guide compliments the other SEMI Standards related to glass material for 3D-IC applications below:

  • SEMI 3D2, Specification for Glass Carrier Wafers for 3DS-IC Applications
  • SEMI 3D11, Terminology for Through Glass Via and Blind Via in Glass Geometrical Metrology
  • SEMI 3D16, Specification for Glass Base Material for Semiconductor Packaging
  • SEMI 3D21, Guide for Describing Glass-Based Material for Use in 3DS-IC Process

Get Involved

The next 3DP&I Technical Committee meetings will be held in in conjunction with the North America Standards Spring 2020 Meetings held March 30-April 2. There is no cost to attend these meetings, but registration is required. Please register here.

Make sure your voice is heard and your company influences the development of the SEMI Standards that are critical to the industry by becoming a SEMI Standards Program Member. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

 

Standards Watch
SEMI
www.semi.org
March 5, 2020

 

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