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MEMS

SEMI is excited to recognize Elizabeth Lee of X-Fab as the SEMI Spotlight on Women Honoree for Q2 2019!Spotlight on SEMI Women celebrates the many accomplished women who work in the global microelectronics industry. Nominees in the quarterly spotlight include women who are beacons of knowledge, leaders of organizations and initiatives, hidden heroes and innovators in our industry. They are volunteers, protectors, intellectual disruptors and activists. Learn how you can nominate a woman for Spotlight on SEMI Women.Elizabeth Lee has loved technology from a young age. As a child, Elizabeth once took apart a broken VHS player and managed to repair the device, armed with nothing but a few simple tools and a strong sense of curiosity. After her more than 15 years in the microelectronics industry, it’s clear that this love – along with Elizabeth’s drive, curiosity, and tenacity – has allowed her to thrive in her career and have a significant impact as a leader not only as a quality systems engineer at X-Fab but in her community.Growing up in a rural Texas town of fewer than 200 people, Elizabeth found opportunities to learn about STEM extremely limited. Although Elizabeth’s interest in technology started at a young age, her first real learning opportunity came during a high-school computer science class. Fascinated by the physics of how computers work, Elizabeth became inspired to pursue electrical engineering at Texas Tech University after graduation.Elizabeth’s transition to university life was difficult. She struggled to balance life as a young mother with her studies and became frustrated when she saw no career path to electrical engineering. During her junior year at Texas Tech, Elizabeth was ready to move into a different field and requested a transfer into civil engineering. Looking back, Elizabeth sees this moment as a crucial turning point in her life that would eventually propel her into the semiconductor industry. Her academic advisor, also a woman, denied the transfer request and pushed Elizabeth to remain in electrical engineering. The advisor also urged Elizabeth to expand her focus outside of academics and get hands-on experience through undergraduate research.Elizabeth acted on the advice and found herself performing research at the Texas Tech nanotech center. She also began volunteering with West Texas BEST – a high-school robotics program that engages students in STEM and semiconductor technologies.Elizabeth has now volunteered for BEST for more than 18 years. She has served on its computer game development board, helping to design games and create rules, and contributed as an author. Elizabeth also served on the South Plains chapter of IEEE as secretary of the board, vice chair, chair, and is now an advisor for the TTU IEEE student brand of WiE (Women in Engineering).She is also a member of the Industrial Advisory Board of the Electrical and Computer Engineering department at Texas Tech University and the Faculty/Staff committee chair. More recently, Elizabeth participated in SEMI High Tech U (HTU), a STEM immersion program for high-school students, and will serve as an emcee for the third time in an upcoming HTU program. Elizabeth graduated with a master’s from Texas Tech after her research in MEMS biomedical lab-on-a-chip and quantum mechanics evaluation of AIO2 tunnel junctions. In 2004, she began her journey with X-Fab, where her responsibilities have included sustaining legacy node silicon technologies and developing yield improvement analysis techniques in the areas of silicon and silicon carbide. She was awarded the Technical Ladder distinction of Principal Engineer in 2015.Today, Elizabeth has more than 15 years of experience in quality, yield improvement, and process integration, all areas that support X-Fab foundry customers with yield and failure investigations. In addition to her technical accomplishments, she represented X-Fab as a Value Promoter, introducing new X-Fab employees to its core values. Over the course of Elizabeth’s career at X-Fab, she has continued to lead key improvement initiatives and dedicate herself to her community.Cristina Sandoval is manager of Workforce Development at SEMI.
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For medtech applications to flourish, sensors need a supporting infrastructure that translates the data they harvest into actionable insights, says Qualcomm Life director of business development Gene Dantsker, who will speak about the future of digital healthcare in the Medtech program at SEMICON West. “Rarely can one device give a complete diagnosis,” he notes. “What’s missing is the integration of all the sensor data into prescriptive information.” The maturing medtech sector has developed to the point where sensors can now capture massive amounts of data, conveniently collected from people via mobile devices. The sector now has higher compute capacity to process the data, and improving software can produce actionable insight from the information. The next challenge is to seamlessly integrate these components into legacy medical systems without disrupting existing workflow. “Doctors and nurses don’t have time for disruptive technology – a new system has to be invisible and frictionless to use, with one or fewer buttons, no training and truly automatic Bluetooth-like pairing,” he says. “So device makers need to pack all system intelligence into the circuits and software.”Getting actionable healthcare information from sensors requires integration into the existing medical infrastructure. Source: Qualcomm LifeOne interesting example is United Healthcare’s use of the Qualcomm Life infrastructure to collect data from the fitness trackers of 350,000 patients. The insurance company then pays users $4 a day, or ~$1500 a year, for standing, walking six times a day and other behaviors that clinical evidence shows will both improve patient health and reduce healthcare costs. “It’s a perfect storm of motivations for all stakeholders,” he says.Next hot MEMS topics: Piezoelectric devices, environmental sensors, near-zero power standbyWith sensor technology continuing to evolve, look for coming innovations in MEMS in piezoelectric devices, environmental sensors and near zero-power standby devices, says Alissa Fitzgerald, Founder and Managing Member of A.M. Fitzgerald and Associates, who will provide an update on emerging sensor technologies in the MEMS program at SEMICON West.Piezoelectric devices can potentially be more stable and perhaps even easier to ramp to volume than capacitive ones, with AlN devices for microphones and ultrasonic sensors finding quick success. Now the maturing infrastructure for lead zirconate titantate (PZT) is enabling the scaling of production of higher performing piezo material with thin film deposition equipment from suppliers like Ulvac Technologies and Solmates and in foundry processes at Silex and STMicroelectronics, she notes.In academic research, where most new MEMS emerge, market interest is driving development of environmental sensors and zero-power standby devices. With demand for environmental monitoring growing, much work is focusing on technologies that improve the sensitivity, selectivity and time of response of gas and particulate sensors. Research and funding is also focusing on zero or near-zero power standby sensors, using open circuits that draw no power until a physical stimulus such as vibration or heat wakes them up.MEMS, however, likely won’t find as much of a market in autonomous vehicles as once thought. “While the automotive sensor market will need many optical sensors, MEMS players are competing with other optical and mechanical solutions,” says Fitzgerald. “And here the usual MEMS advantage of small size may not matter much, and the devices will have to meet the challenging automotive requirements for extreme ruggedness.”Paula Doe, SEMI
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