Determining the Detection Limit / SEMI C10 - Recording

Agenda 

Part 1:  Detecting the Detection Limit – Broad View of Detection Limit Standards / Issues

• The Swamp:  Why so much disagreement? 
• Basic Detection Limit concepts
• Calibration’s under-appreciated role
• Detection Limit Quantification Uncertainty
• DL Usage Contexts and Reporting Practices
• What’s required to build a Detection Limit standard?

Part 2:  SEMI C10 – Guide for Determination of Method Detection Limits

• How does it work? 
• What does it assume?
• What are its strengths and limitations?
• How should SEMI C10 derived Detection Limits be applied?
• What form could an update to SEMI C10 take and why?

Establishing standardized detection limits for materials in semiconductor manufacturing has long been a barrier to effective detection limit solutions despite decades of developmental efforts since the detection limit definition process is influenced by a variety of disciplines, often with conflicting interests.

The analytical chemist approaches it from a perspective of analytical science, the statistician from a statistical theory viewpoint, the regulator from a governance standpoint and the regulated in a way that reduces regulation costs. The instrument manufacturer is focused on selling products and the contract laboratory on pitching services.

This byzantine mix partly explains why conflicts abound.

The current version of SEMI C10 - Guide for Determination of Method Detection Limits sets out important and useful guidance for these concepts. Key detection limit concepts, including the problems caused by our natural biases must be explored and understood. Issues in detection limit and rule-set application will be probed since it is at the application level that detection limit standards succeed or fail.

The workshop explores how applying SEMI C10 to detection limit procedures helps improve yields and manufacturing processes. Our journey of navigating the detection limit obstacle course begins with a broad view of the problem focused on developing a conceptual understanding of key detection limit concepts and limitations. Statistics plays a key role in effective detection limit definition; but need to be the last and final piece of solving the detection limit puzzle where they drive the development of an appropriate statistical practice for detection limit standards.

About Tom Bzik

Tom Bzik works as a statistical consultant for EMD Electronics after a career at Air Products and Chemicals, Inc. He served as Chair of ASTM - E11 Quality and Statistics, which manages an extensive portfolio of international statistical standards, from 2018-2021. He chaired the Statistical Methods Task Force in SEMI International Standards for over 20 years and is co-chairing its restart. Bzik has taught at several universities including his alma mater, the University of Connecticut. He was the keynote speaker at the ASTM Symposium for Detection Limits in 2018. Bzik has published many papers and presentations with a focus on properly handling the unique data characteristics of trace contamination data.

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