Wooptix

Wooptix is an advanced imaging company with patented solutions for the detection of the wave front phase and the light field. Head quartered on the Spanish island of Tenerife, Wooptix was founded based optics technology developed at the world’s largest telescope Teide. Wooptix has developed Wave Front Phase Imaging (WFPI), a new technique for high resolution wafer geometry allowing the entire 300mm wafer to be imaged in a single snapshot acquiring tens of millions of data points in less than a tenth of second providing sub nano meter height resolution and single digit micron spatial resolution. Using high pass filtering on the global topography data map enables the system to also reveal roughness and nano topography globally without the time-consuming site scanning and stitching. WFPI is suitable for both FEOL on blank wafers as well as for BEOL on patterned wafers that require topography data fed forward into the lithography scanner. Wooptix has a commercial manual lab tool for wafers up to 300mm with a max bow of ±3mm that is very resilient to vibrations and wafer placement both vertically and laterally. A fully automated system for semiconductor fab operations is in the process of being developed.