Verity Instruments, Inc.

Verity Instruments, Inc. is an instrument manufacturer specializing in optical-based instruments and software applications for etch endpoint, advanced process control, and metrology. In 1980 Verity introduced a portable spectrograph for the analysis of plasma emissions. This product was followed shortly by a monochromator system for detecting process optical endpoints. Today, our product line includes a wide range of optical emission sensors, spectrometers, reflectometers, and a miniature microwave-based plasma source for monitoring enhanced optical emissions in "dark" or low intensity plasma applications.