TOFWERK

TOFWERK is making the world a cleaner place through innovative solutions for chemical analysis. Our scientists and engineers design, manufacture, and optimize high performance mass spectrometers for new applications to support researchers and industrial customers around the world.  Innovative solutions for advanced semiconductor processes – TOFWERK offers solutions for ultra-sensitive (pptV) real-time AMC monitoring in semiconductor fabrication processes with the Vocus CI-TOF and sensitive process gas analysis for R&D and production environments in etch, deposition and lithography processes with the pgaTOF. Advanced AMC visibility with the Vocus ABC and VOC Monitors For comprehensive AMC monitoring, the Vocus provides two solutions for the monitoring of acids, bases and condensables, as well as comprehensive VOC coverage.  The unprecedented mobility provided by these compact solutions enables proximity measurements of solvents and condensables around targeted locations, and customizable sampling configurations allow for easy integration into FOUP – AMC monitoring systems. When coupled with a multi-port sampler, one Vocus can cover a large area or designated regions in the fab. The combination of FOUP, mobile, and multi-port monitoring provides manufacturers with a co(more...)