Spectrum Environmental Solutions

Spectrum Environmental Solutions specializes in exhaust gas analysis for the semiconductor industry based on our family of optical spectroscopy systems. We support some of the county's leading chip fabrication sites with consulting services, metrology systems and our data management expertise. Our work supports regulatory emission compliance & reporting and it also provides data capture and handling for our clients' greenhouse gas (GHG) reduction initiatives. At Spectrum, we work with wafer fabs on abatement system verification and maintenance optimization; we install instrumentation for real time monitoring of sub-fab exhaust laterals and we characterize end of pipe scrubber performance. Spectrum's customer base also includes semiconductor tool manufacturers particularly in the areas of Etch, CVD and Lithography. These activities are generally driven by research into alternative chemistries for GHG reduction. The high resolution of our devices make it well suited for R&D in addition to real time tool monitoring in manufacturing environments.