SONOSYS Ultraschallsysteme GmbH
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SONOSYS Ultraschallsysteme GmbH
Member Since
Apr 6, 2023
Member ID
1031388
Website
Location
Daimlerstrasse 6
Neuenbuerg
D-75305
Germany
Primary Industry
Semiconductor
Primary Product Category
Equipment and Sub-Systems
Company Profile
SONOSYS offers high frequency ultrasonic solutions (=Megasonic) to clean smallest particles down to the few nanometers range by not or minimal pattern damage. This is used in semiconductor, MEMS, optics and the food industry. The semiconductor applications are mainly wafer and photomask cleaning, both in a single or batch cleaning process.