OEG GmbH

OEG GmbH has been developing and producing optical measuring instruments since 1991. For the semiconductor industry, OEG GmbH supplies special contact angle measuring instruments. In the maximum configuration, these are equipped with a wafer robot, loadport and SECS(GEM) interface, which is the SURFTENS WH 300. We also supply EBR measuring systems. These can be delivered as an add-on module to the contact angle measuring device. Otzher products for the semiconductor industry are measuring systems for thin film stress (Waferstress). A very popular and well-liked device that is used worldwide is our precision wafer scriber for 200mm wafers: MR200.