MICRO-EPSILON Messtechnik GmbH & Co. KG

Micro-Epsilon offers reliable, powerful and unique sensor solutions for the semiconductor industry particularly when high precision measurement is required. The product range covers vacuum ready sensors for distance and thickness measurement, sensors for IR temperature measurement, as well as systems for 3D measurement. Micro-Epsilon sensors have been used successfully in the semiconductor industry for many years, in complex front-end processes as well as in back-end applications of wafer fab automation. The sensor products offering an extreme accuracy, even in applications with high acceleration, strong magnetic fields and ultra-high vacuums. Applications are e.g. the position control of photomasks and lens systems, the positioning during wafer handling and the correct position of mirrors and optical elements. Micro-Epsilon is headquartered in Germany and has local subsidiaries in North America, Europe and Asia.