KUBOTA Corporation

Kubota Corporation provides advanced semiconductor wafer defect inspection equipment that utilizes the ""optical,"" ""image,"" and ""precision machinery"" technologies it has cultivated over many years in the precision equipment business. Our products meet the wide range of inspection needs of customers with a variety of technologies, including the laser scattering method for highly accurate detection of submicron-order particles and scratches on substrate surfaces, the microscope method with excellent defect discrimination capabilities, and the appearance inspection method for high-speed inspection of defects that can be detected by visual inspection.