Fugen Co., Ltd

FUGEN is specialized in developement, repair, maintenance, remodeling and improvement of 200mm and 300mm ETCH equipment. FUGEN holds a patent for etching method of atomic layer of oxide film, and has developed an etching device and is in the process of commissioning it. We are continuously developing the etching system. FUGEN also develops and repairs various robots, load ports, vacuum valves and so on. FUGEN is registered as official repair company in SK Hynix Wuxi and SK Hynix Semiconductor factories for various vacuum valve. FUGEN is repairing and selling various equipment parts related to LAM equipment. In particular, DUAL L-motion Valve, which is developed by FUGEN replacing OEM Rocker Valve, has been evaluated by the SK Hynix process and many of them have already been installed to the production systems. FUGEN is repairing and delivering AMAT Producer VHP and Endura XP robots as official supplier of FALA TECHNOLOGY(distributor SPARETECH).