Atlas Technologies

Performance Vacuum Chambers & Bonded Bimetals Atlas Technologies is a fully integrated US-based facility with on-site design, development, testing and manufacturing capabilities. We specialize in aluminum and titanium vacuum chambers and bimetal components. Atlas custom vacuum chambers support ultra-high vacuum (UHV), extra-high vacuum (XHV), and ultra-high purity (UHP) applications, making them ideal for wafer manufacturing, processing and movement, etching and lithography, ion implantation, and packaging control. Aluminum and titanium chambers offer reduced contamination and a non-magnetic environment for better optics control in semiconductor lithography. The chambers also handle greater heat cycling challenges, bake out much more quickly than stainless steel, and due to their light weight, are easily maneuverable. Metallurgically bonded dissimilar metal flanges and fittings allow easy connection of aluminum and titanium vacuum chambers to stainless steel infrastructure.