Zhejiang Micromagneticprecision Technology Co., Ltd

Vacuum rotary feedthroughs are widely used in high-vacuum systems such as robots semiconductors solar cells single crystal silicon furnaces sputtering PECVD,EPI PVD MOCVD, liquid crystal Display process vacuum coating systems,etc.

磁流体真空密封传动装置，可用于单晶硅炉，离子注入机，PECVD,MOCVD.PVD.真空热处理炉，真空镀膜等高真空设备上，半导体零部件的精密制造，可为各种半导体设备配套制造各种零部件，真空腔体，机器人部件的精密制造，可为真空机器人设备配套制造各种零部件.