Hefei Thermo Quartz Semi Materials Co.,Ltd

The company produce high-precision quartz parts and thermocouple for semiconductor industry based on independent R&D capability. The quartz and thermocouples are widely applied in epitaxy and diffusion of wafer process . The company provide high quality products such as tube、 injector、 boat、 chamber、 gold -coated chamber、 electrostatic cup、thermocouple and so on for customers in China.

公司研发生产先进制程半导体用高纯石英部件及高精度热电偶。产品覆盖外延、扩散 等工艺环节。主要包括石英炉管、喷射管、石英舟、石英方腔、石英转动轴、石英镀金腔、石英静电吸盘、热电偶等产品。产品主要客户覆盖国内晶圆制造、国产装备商、国产硅片制造商。