Technical Committee Charter
To identify and develop international standards fulfilling the technical needs of the industry for liquid chemicals and liquid chemical distribution. The Liquid Chemicals Committee standardization includes:
- analytical methods for evaluating liquid chemicals and materials used to contain and transport them,
- specifications for liquid chemicals, and the materials used to transport them,
- contamination related issues and analytical methods,
- performance specifications for liquid chemicals distribution systems and components,
- physical interface specifications for sub-systems and components, and guides for definition, use, handling and installation.
- Backend Factory Integration Task Force
- Diagnostic Data Acquisition (DDA) Task Force
- Fab & Equipment Information Security Task Force
- GEM 300 Task Force
- Information & Control Committee Maintenance Task Force
- Sensor Bus Task Force
- Advanced Backend Factory Integration (ABFI) Task Force
- Diagnostic Data Acquisition (DDA) Task Force
- Energy Saving Equipment Communication (ESEC) Task Force
- Fab & Equipment Computer and Device Security (CDS) Task Force
- GEM 300 Task Force
- Graphical User Interfaces (GUI) Task Force
- Process Control Systems (PCS) Task Force
- Sensor Bus Task Force
- Backend Factory Integration Task Force
- Equipment Information Integration Task Force
- Fab & Equipment Information Security Task Force
- GEM 300 Task Force
Published Standards*
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C10 — Guide for Determination of Method Detection Limits
SEMI C30 — Specification for Hydrogen Peroxide
SEMI C35 — Specification and Guide for Nitric Acid
SEMI C64 — SEMI Statistical Guidelines for Ship to Control
SEMI C79 — Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
SEMI C90 — Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
SEMI C93 — Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System
SEMI C95 — Guide for Pentakis Dimethylamino Tantalum
SEMI C96 — Test Method for Determining Density of Chemical Mechanical Polish (CMP) Slurries [NEW]
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI F31 — Guide for Bulk Chemical Distribution Systems
SEMI F39 — Guide for Chemical Blending Systems
SEMI F41 — Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing
SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI F61 — Guide to Design and Operation of a Semiconductor Ultrapure Water System
SEMI F63 — Guide for Ultrapure Water Used in Semiconductor Processing
SEMI F75 — Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing
SEMI F98 — Guide for Treatment of Reuse Water in Semiconductor Processing
SEMI F104 — Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI F108 — Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications