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Technical Committee Charter

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To identify and develop international standards fulfilling the technical needs of the industry for liquid chemicals and liquid chemical distribution. The Liquid Chemicals Committee standardization includes:

  • analytical methods for evaluating liquid chemicals and materials used to contain and transport them,
  • specifications for liquid chemicals, and the materials used to transport them,
  • contamination related issues and analytical methods,
  • performance specifications for liquid chemicals distribution systems and components,
  • physical interface specifications for sub-systems and components, and guides for definition, use, handling and installation.


  • Diaphragm Valves Task Force
  • Liquid-Borne Particle Counter Task Force
  • Liquid Filter Task Force
  • Trace Metal Analysis for High Pure IPA Task Force
  • Welding Fitting Task Force
  • Chemical Analytical Methods (CAM) Task Force
  • Chemical Mechanical Planarization Consumables (CMP-C) Task Force
  • High Purity Liquid Assemblies & Systems Task Force
  • High Purity Polymer Materials and Components Task Force
  • Ultra Pure Water Task Force
  • Water Management Task Force
  • Precursor Specifications Task Force
  • Solvents in Advanced Processes Task Force
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Industry Participation is Critical

Companies that actively participate in the development process stay current with industry technology trends, and more importantly, influence the direction of the industry. Participation in SEMI International Standards is free to all industry stakeholders. For more information please contact SEMI Standards Staff in your region.

Published Standards*

SEMI C1 — Guide for the Analysis of Liquid Chemicals

SEMI C10 — Guide for Determination of Method Detection Limits

SEMI C30 — Specification for Hydrogen Peroxide

SEMI C35 — Specification and Guide for Nitric Acid

SEMI C64 — SEMI Statistical Guidelines for Ship to Control

SEMI C79 — Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems

SEMI C90 — Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems

SEMI C93 — Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System

SEMI C95 — Guide for Pentakis Dimethylamino Tantalum

SEMI C96 — Test Method for Determining Density of Chemical Mechanical Polish (CMP) Slurries [NEW]

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies

SEMI F31 — Guide for Bulk Chemical Distribution Systems

SEMI F39 — Guide for Chemical Blending Systems

SEMI F41 — Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing

SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing

SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

SEMI F61 — Guide to Design and Operation of a Semiconductor Ultrapure Water System

SEMI F63 — Guide for Ultrapure Water Used in Semiconductor Processing

SEMI F75 — Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing

SEMI F98 — Guide for Treatment of Reuse Water in Semiconductor Processing

SEMI F104 — Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

SEMI F108 — Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications