NTHU Micro Sensors and Actuators Technology Consortium, μSAT
http://www.usat.org.tw
uSAT provides the following key technologies and services:(1)Micromachining processes module/integration technologies(2)Device integration and packaging technologies(3)Material properties characterization, Devices functional tests, etc.(4)Sensors for motions, pressure, magnetic, temperature, humidity, microphone, etc.(5)Electrostatic, Piezoelectric, Magnetic, Thermal Actuators, etc.(6)Switch, Scanning Mirror, Autofocus, Image-stabilizer, etc.(7) Resonator, Oscillator, and Filter technology(8) Sensing Circuits Design and Tape-out