STMicroelectronics

With the rapid proliferation of electronics applications with more powerful embedded intelligence, demand for smarter, more efficient sensors is increasing to help devices connect to the world around them. As the semiconductor industry drives the future of connected technologies and sustainable solutions, it faces challenges in energy consumption, resource management, and ensuring data security.SEMI spoke with Simone Ferri, Vice President and General Manager at STMicroelectronics (ST), about current trends and challenges in the Micro-electromechanical Systems (MEMS) and imaging sensors market and how ST is driving innovation in this rapidly evolving industry. Ferri shared insights ahead of his keynote presentation at the SEMI MEMS Imaging Sensors Summit on November 14, 2024, in Munich. Registration is open.SEMI: Welcome, Simone, and thank you for sharing your perspective on the dynamics and trends for today’s MEMS and imaging sensors. To start, how would you describe the current market dynamics for these technologies, and what key factors are influencing these dynamics? Ferri: Right now, the MEMS and imaging sensors market is primarily driven by applications such as automotive electronics, consumer medical devices, AI-powered devices, and intelligent wake-up systems.According to Omdia, the MEMS market is projected to reach approximately $11 billion by 2027, with a CAGR of 2.8% from 2022 and 2027. Currently, automotive applications account for 50% of this market, with industrial at 15% and consumer at 35%. Notably, the automotive sector is the fastest growing, with a 5.4% CAGR, driven by the increasing use of inertial measurement units (IMUs) and microphones.In addition, Yole Group estimates that the imaging market, including optical sensing, will grow at a 4.7% CAGR between 2023 and 2029. Although mobile phone applications remain the primary driver of Complementary Metal-Oxide-Semiconductor (CMOS) image sensors (CIS) volumes, other sectors, including consumer electronics, automotive, and security imaging, are also contributing to the growth.Long-term forecasts for smartphone sales have been trending downwards, but mobile phones still remain a major driver of applications, innovation, and overall volume in the imaging market. Notably, the automotive imaging sector is one of the fastest growing markets and is expected to drive additional demand for CIS.Factors that influence the current market include global economic conditions, regulatory changes, geopolitical factors, technological innovations, and the emergence of new applications and use cases.SEMI: Can you elaborate on the growth strategies that STMicroelectronics is adopting to stay competitive in the MEMS and imaging sensors market? Ferri: ST has played a pivotal role in both the MEMS and imaging sensors markets for over two decades with its proprietary silicon technologies. We fully leverage our Integrated Device Manufacturer (IDM) business model, which allows us to support our customers through integrated capabilities for both design and manufacturing.To remain competitive, we are exploring new markets for MEMS sensors, particularly in digital healthcare with biosensors, where wearable devices are expected to exceed 500 million units per year by 2027.We’re focusing on the growing demand for automotive sensors such as accelerometers, Inertial Measurement Units (IMU), and pressure sensors, particularly with the rise of electric vehicles. We are enhancing the integration and synergy between automotive and personal devices. For example, we are combining high-g and low-g accelerometers within a single IMU, enabling accurate fall and crash detection, along with precise orientation and wake-up functionality.AI is another one of our priorities. In today's digitalized world, AI enables real-time, contextual understanding and the ability to make decisions that optimize and reduce the power consumption of the final device. Sensors are no longer merely for data collection. Thanks to AI, sensors can interact with their environment and significantly contribute to innovation and sustainability.We are also prioritizing low power consumption. Our MEMS technology operates in low-power mode with almost negligible energy use, activating only when necessary, without waking up the system to understand its environment or to be reconfigured.In addition, we’ve seen optical sensing continue to grow year over year. Optical sensing now offers features such as 3D capture, low-power and low-footprint computer vision, Near InfraRed (NIR) and even Short Wavelength InfraRed (SWIR).We are accelerating and leveraging our IDM model and broadband semiconductor supplier positioning to propose wider system offerings based on the array of sensors and microprocessors that ST develops. As the world shifts toward widespread use of sensors and data collection, the demand for secure sensing technologies is growing, extending beyond mobile and PC applications to spatial computing and AR/VR environments. For example, if we are talking about recognizing specific persons in an AR environment, we don't want the data related to these persons to be sent to the cloud before a decision is made about whether they are supposed to be there or not, as such information can be intercepted. We want all the data to be managed at sensor level and only a warning of rejection or acceptance to be transferred outside our secure sensor. SEMI: What are some of the latest technological innovations in MEMS and imaging sensors that are shaping the industry? Ferri: In MEMS, we're seeing significant advancements in three key areas:- In-sensor AI is integrating technologies in the sensors such as machine learning core (MLC), adaptive self-configuration (ASC), and intelligent sensor processing units (ISPU).- Open sensors are designed to interface seamlessly with other sensors, allowing third parties to benefit from on-sensor processing innovations, while building an ecosystem to create joint value with customers.- Accurate sensors are providing high-precision data, enabling better decision-making and smoother, more natural user interactions. These sensors also reduce factory calibration time and resources, leading to overall lower energy consumption. Because of their accuracy, onboard MLC, and ASC, the sensors can also reconfigure themselves without interaction with the processor, thus guaranteeing the proper accuracy at lower power consumption, at any time, under any condition.In the imaging sensor market, key trends include:- Higher Pixel performance is leading to improved signal-to-noise ratio (SNR), low light performance, better quantum efficiency (QE) and lower noise performance. Despite post processing, pixel performance remains the key factor as SNR performance must remain high while the pixel shrink roadmap advances.- Embedded Intelligence is providing local processing for local decision making, enhanced security, advanced image sensor processing (ISP) for improved image quality, and fusing sensor functions to deliver a better user-experience.- "Always on" capabilities are supporting mass sensorization and deployment of optical sensing solutions everywhere through specific low-power design techniques, process development, and overall system architecture optimization.SEMI: Looking toward the future, what trends do you anticipate will have the most significant impact on the MEMS and imaging sensors market? Ferri: Some macrotrends for sensors include:Electrification: Certain consumer and industrial applications are now being adopted in the automotive sector, especially with the rise of electric vehicles creating new opportunities for innovation and for new players to enter the market. As example, the predictive maintenance that has been developed for industrial electric motors is ported 1:1 to electric vehicles.AI: Regarding data transmission, distributed architecture will push AI towards edge computing, increasingly supported by advancements in 6G and foldable technologies. Additionally, as AI becomes more integrated, the maintenance and security for AI will require more attention.Smart home, buildings, and cities: As cities grow, the demand for smart homes and buildings rises, requiring more sensors to manage energy, security, and urban infrastructure efficiently. Over 55% of the global population and 70% of the EU population reside in cities. Urban areas generate more than 80% of the world’s GDP, and by 2030, it's anticipated that 68% of the global population will be urban dwellers, pointing to the growing need for smart cities.Aging population and digital health: The integration of biosensors with MEMS technology will be crucial for addressing the needs of an aging population.Overall, the use of image sensors for environmental sensing is steadily increasing. This is a major focus for ST, particularly in 3D sensing. New use cases, such as presence detection, are enhancing security and reducing power consumption due to efficient data processing. Additionally, the average number of cameras in smartphones, automobiles, and even in devices like robots and vacuum cleaners, continues to grow.SEMI: What has STMicroelectronics been working on, and what are your plans for the upcoming years? Ferri: To date, we have shipped over 23 billion MEMS sensors. Still, we remain committed to continuously improving our products and enhancing our MEMS technology in terms of affordability, miniaturization, performance, and novelty. We are striving to set the stage for a future defined by innovation and excellence with:Evolution of our current product portfolio by investing in lower power consumption, lower supply voltage, and additional and more sophisticated in-sensor AI for an effective distributed AI conceptNew sensors for presence detection, like infrared (IR) sensors, and health-focused sensors such as biosensors.MEMS sensors are also becoming increasingly accurate, open towards different ecosystems of technologies, and so intelligent that they can self-configure and reduce power consumption thanks to optimal data processing. These attributes allow us to provide meaningful and sustainable solutions across sectors such as automotive, industrial, infrastructure, and personal electronics, enabling us to improve energy efficiency, reduce waste, and support sustainable practices for a greener planet.For the past 10 years, ST has focused on depth sensing across multiple use cases. Today, ST is the number one in the world for time-of-flight solutions through our ST FlightSense product family. More recently, we launched our global shutter image sensors family, ST BrightSense, to address markets like personal electronics, automotive, industrial, communications equipment, and computers and peripherals.More specifically on the automotive side, we have the portfolio, customers, and customer program awards to lead the driver and occupancy monitoring market. We continue to secure design wins from our growing customer base while we expand our product portfolio and broaden our customer and application footprints.SEMI: What are some of the biggest challenges facing the MEMS and imaging sensors industry today, and how is ST addressing them? Ferri: The MEMS and imaging sensors industry faces several challenges, but with strategic planning and innovative solutions, companies can overcome these obstacles by focusing on the following:Integration: With our biosensors, we are doing more with less space. For example, in a standard accelerometer, we integrate an analog front end for electrocardiogram (ECG) analysis, enhancing functionality without increasing the device footprint.Performance enhancement: Ensuring high performance and reliability in various environmental conditions is crucial, especially in automotive and healthcare applications. To meet these demands, we deploy comprehensive testing protocols to ensure our sensors meet performance and reliability standards.Power efficiency: Reducing power consumption is vital, particularly for battery-operated devices like smartphones and IoT devices. We are developing low-power architectures to address this need.Data security: With the growing use of imaging sensors in surveillance and personal devices, data security and privacy have become paramount. Our solutions include encryption for data transmission and storage, as well as robust access control mechanisms to prevent unauthorized access to sensor data.Additionally, supply chain issues remain a significant challenge today. We believe our strategy and capacity as an IDM, combined with our strong innovation capabilities, give us a competitive edge in supply chain management.SEMI: What are you most looking forward to at the MEMS Imaging Sensors Summit, and what does it mean for the European semiconductor industry? Ferri: I look forward to the Summit as a valuable opportunity to connect with industry peers, share insights, and explore new collaborations. I encourage my peers to attend, as it’s a unique platform to collectively shape the future of our industry and sustain Europe’s leadership in semiconductor innovation. About Simone FerriSimone Ferri is Vice President of APMS Group and General Manager for MEMS sub-group at STMicroelectronics. Ferri began his career in STMicroelectronics in 1999 as an R D engineer before becoming a digital designer for the company’s audio division, leading into product management after 5 years. In 2014, ST entrusted Ferri with MEMS consumer sensors followed by global MEMS-sensor related Marketing and Application activities across all markets and segments, leading into his current role. Ferri graduated with a degree in microelectronics from Politecnico di Milano (Polytechnic of Milan), where he also completed his MBA. Sitong He is Marketing and Communications Manager at SEMI Europe.

Electric mobility, renewable energy and other technology innovations like IoT, 5G, smart manufacturing and robotics all require reliability, efficiency, and compact power systems, fueling the adoption of Silicon Carbide (SiC) and Gallium Nitride (GaN) to support lower voltages in significantly smaller devices. But chip designers must overcome the technological and economical challenges of integrating the two semiconductor materials into power systems.SEMI spoke with Elisabeth Brandl, Business Development Manager at EV Group about trends and new developments within the power electronics industry and the devices' application in smart mobility. Brandl shared her views ahead of her presentation at the SEMI SMART Mobility Forum, 18 February, as part of the SEMI Technology Unites Global Summit, 15-19 February 2021, online event. Join us to meet experts from EV Group and other key industry influencers. Registration is open. SEMI: What is driving new developments in power electronics?Brandl: Globally there are significant changes in infrastructure requirements for communication, automotive and power conversion. We need to look no further than the rising adoption of 5G, electric and hybrid vehicles, and renewable energy as examples of drivers of these changes. The device level, particularly in the field of power electronics, figures prominently in these shifts.The power electronics industry faces a growing number of scenarios where conventional silicon power devices are no longer suitable and are easily outperformed by new architectures mainly based on wide bandgap semiconductor materials like Silicon Carbide (SiC) and Gallium Nitride (GaN).SEMI: What industry challenges is power electronics innovation aiming to solve? Brandl: Power conversion efficiency is very important and needs further improvement as the related losses significantly contribute to the overall power consumption. For green power and a better environmental footprint, renewable energy is crucial, but so is overall power-consumption efficiency, yet the role of power devices is often underestimated. High-frequency and high-power applications, such as data center applications and inverters for renewable energy, where silicon power electronics are reaching their limits, are also important areas in power electronics.SEMI: How will the transition from silicon to compound semiconductor materials help?Brandl: The superior material properties of several compound semiconductors can tackle the need for lower losses in power conversion or better high-frequency behavior. Today, we mainly talk about GaN and SiC power devices as they are materials well-suited to address these needs. However, other materials like diamond and gallium oxide are in development for these applications. Material properties of SiC that enable thinner materials with lower power losses and better thermal behavior address power conversion efficiency as well as form factor challenges. GaN, especially in a high electron mobility transistor (HEMT), can be used for high-frequency applications.SEMI: What enables a better and more cost-effective manufacturability of SiC and GaN power devices?Brandl: For the end customer, a typical figure of merit regarding the cost effectiveness is $ per Ampere or Watt. While this seems simple, the reality is of course more complex. It is important to understand the main cost contributors within the manufacturing area. For SiC, this is clearly the substrate cost. In my presentation, I will show a way to reduce this cost via wafer bonding. For GaN, epitaxy – a method for growing or depositing mono crystalline films on a substrate – is the critical parameter. And of course, yield has a very big impact on cost effectiveness too, which means that good process control including metrology is very important.SEMI: Many semiconductor companies are already transitioning to silicon carbide and gallium nitride. Can you give us an example of a success story?Brandl: All the big power device manufacturers have either acquired or developed their SiC and/or GaN power device technology, so they also see a bright future for these wide bandgap semiconductors in the power device market. The most prominent success story is STMicroelectronics with its SiC MOSFET power devices, which have been implemented by Tesla in its Model 3 vehicles since 2018.SEMI: What is coming next?Brandl: New materials for power devices are being explored, such as diamond and gallium oxide. For SiC, the trend is moving toward 8-inch substrates, which is the focus of the funded EU project REACTION under the coordination of STMicroelectronics. Cost reduction and substrate availability also play a big role. All major power device manufacturers have contracts to secure the supply chain for SiC substrates because material availability is the main uncertainty at this time. Finally, collaborations along the supply chain are crucial and generally beneficial for all parties, as development requirements are better communicated and prioritized.Elisabeth Brandl is Business Development Manager at EV Group. She received her master in technical physics from the Johannes Kepler University Linz, Austria in Semiconductor and Solid State Physics. Since 2014, she has been responsible for Product Marketing Management for temporary bonding and compound semiconductors at EVG. The SMART Mobility Forum is the digital platform of SEMI Europe’s Global Automotive Advisory Council (GAAC) for industry stakeholders along the automotive and electronics value chains, from Design, Semiconductor Equipment and Materials Suppliers to Automotive OEMs.Smart Mobility is one of four SEMI initiatives focused on building communities, content, and activities around critical and emerging electronics markets. Read more about our Regional Chapters.Serena Brischetto is senior manager of Marketing and Communications at SEMI Europe.

The air we breathe is precious yet neglected as anthropogenic pollutants continue to pour into the earth’s atmosphere. Still, there’s hope that greenhouse gas emissions – and the human behavior behind them – can be brought under control for the good of the planet with the help of gas sensors that gauge pollutant levels.Of the many air pollutants, some are more detrimental to our health than others. Figure 1 lists the top seven pollutants, their chief sources and health effects. The Air Quality Index is calculated by combining values from particles and four gases (carbon monoxide, ozone, sulfur dioxide, nitrogen dioxide). The good news is that gas sensors are available in the market that can monitor each of those pollutants.Figure 1 – Top seven pollutants and their health effects. Source: EPA Air Sensor Guidebook The challenge is that many gas sensor end users today have little understanding of how to compare the performance characteristics of sensors offered by various vendors. SEMI is working to help end users clear that hurdle. SEMI-MSIG this year created a group within its Device Working Group focused on developing gas sensor standards aimed at growing the market and defining guidelines affecting areas including testing methods, reliability requirements, packaging and communication interfaces. Importantly, the standards will also make it easier for end users to make a clear choice among rival products.The SEMI-MSIG Device Working Group comprises devoted experts from leading gas sensor companies as well as OEMs. We welcome companies involved in deploying gas sensors to join this fast-growing group to improve air quality standards in sectors including residential construction, factory automation, automotive, consumer electronics and healthcare. One potential market is consumer electronics such as smart phones since concerns about air quality is growing among device users.The MEMS Sensors Industry Group (MSIG) Device Working group was formed in early 2019. Its mission is to develop a series of technical specifications, industry standards and best practices for MEMS and Sensor devices and platforms. The goal is to advance the use and expansion of MEMS and sensors worldwide.Table 1 – Top seven pollutants and their health effects. Source: EPA Air Sensor Guidebook In the past, we focused on inertial sensors (See IEEE2700 standard for inertial sensors as an example of an output of this team). In 2020, our focus shifted to gas sensors and we plan to expand our work to include other types of sensors in the near feature. Industry leaders such as Bosch, TDK Invensense, Renesas, Infineon, Analog devices, STMicroelectronics, GE and Intel meet every month to strategize on a series of initiatives.If you’re interested in joining the SEMI-MSIG Device Working Group, please contact Carmelo Sansone, Director of MEMS Sensors Industry Group.The MEMS Sensors Industry Group (MSIG) is a SEMI technology community that enables the MEMS and sensor industry to address common challenges, innovate and accelerate business results.Carmelo Sansone is director of the SEMI-MSIG. He has focused his career on building products and system solutions that have large impact in the marketplace. Sansone launched several sensor processor platforms for low-power applications, including the first microcontrollers with DSP capabilities, the core of today’s portable devices intelligence. Sansone has led the successful integration of the MSIG organization into SEMI by expanding its services and global reach. Carmelo holds a master’s degree in Electronic Engineering with a specialization in Biomedical from the University of Pisa and an MBA from Golden Gate University, San Francisco.

Not long after STMicroelectronics opened its first semiconductor plant in Singapore more than 50 years ago, a facility chiefly focused on chip assembly and packaging, the company realized that it had constructed the site in an area with a blossoming chip ecosystem with a bright future. Before long, the company became the first to start a wafer fab facility in the so-called Little Red Dot. Today, our STMicroelectronics Singapore campus sports several buildings that dwarf the original site in the sprawling Ang Mo Kio Industrial Park 2. The facilities feature advanced 200mm manufacturing lines but still produce huge volumes of chips with more than 1,000 pieces of 150mm manufacturing equipment.Much of the wafer equipment dates back to the past century so is no longer supported by the manufacturers, if they’re still even in existence. Yet decades later the chipmaking gear continues to operate with a surprising reliability that far surpasses the longevity called for in its manufacturing specifications thanks to replacement parts and frequent upgrades with more sophisticated handling robots and chucks. Now, as smart manufacturing begins to establish a foothold in the semiconductor industry, Industry 4.0 technology is breathing new life into these aging workhorses.Despite its age, all of the equipment adheres to industry manufacturing standards. The gear is remotely controlled using the SECS/GEM interface protocol that was either originally integrated with the equipment controller or custom-made. We’ve also maximized its usage through advanced recipe management, advanced alarm and event handling, and secured lot identification.Crucially, we decided to systematically deploy a real-time fault detection and classification (FDC) solution using a third-party product based on what today is known as an edge computing architecture. Every piece of critical processing equipment is progressively paired with its dedicated FDC instance running on a virtual machine in the wafer fab data center, and the FDC solution monitors vital equipment parameters at high frequency – depending on the SECS/GEM capabilities of the equipment – and analyzes incoming manufacturing data in real time using classic SPC (statistical process control) algorithms and even AI-class protocols.Our use of the FDC edge solution as a sensor signal aggregator has given our equipment a second life. The solution processes real-time signals from sensors connected through a typical TCP-IP. Sensors have been the old equipment’s saving grace with their ability to de-multiply equipment capabilities and overcome fundamental shortcomings and design weaknesses. The STMicroelectronics Singapore plant first used off-the-shelf sensor nodes with built-in power amplifier and analog input nodes. While very practical and easy to implement, deploying the nodes can be costly. After developing more expertise in sensor integration using FDC, our wafer fab equipment experts decided to design an in-house solution based on the famed STM32 microcontroller. Leveraging Arduino – an open-source electronics platform with easy-to-use hardware and software – the equipment teams can now design and program a variety of in-house sensors for measurements including temperature, humidity, waterflow and pressure. The sensors are integrated with process equipment using the FDC solution. Integrating the sensors with the FDC engine on the edge computer extends the capabilities of old equipment without jeopardizing the integrity of the machines themselves. While the integration can be quick, it must be robust to ensure the reliability of the new measurements. Similarly, ever-increasing connectivity requirements present clear cybersecurity risks that must be managed upfront and each solution must be hardened to minimize security vulnerabilities. Even so, the challenges and risks pale in comparison to the benefits! Jean-Marc PHILIPPE is DIT Director at STMicroelectronics Pte Ltd. He oversees the deployment and support of Digital Solutions to enable STMicroelectronics front-end operations in Singapore and manages manufacturing productivity and automation programs at site level.

For nearly two decades, Sean Ding, CTO and chief scientist of Alibaba Cloud IoT, has worked in software and algorithm architectures, sensing, semiconductors, systems and cloud computing – all areas that have contributed to the rise of the Internet of Things (IoT). It’s no surprise, then, that Alibaba is leading next-generation innovation for the IoT. Ding will bring his expertise to his role as moderator of Brave New World - MSIG Conference on AI+IoT 2019, a half-day forum March 20, 2019, at SEMICON China in Shanghai, China. Maria Vetrano of SEMI spoke with Ding about technologies key to the IoT era including MEMS, sensors, artificial intelligence (AI), edge gateways and cloud computing. SEMI: MEMS sensors are widely used in IoT devices. What is the relationship between AI and MEMS sensors?DING: While MEMS sensors and AI will increasingly co-reside in end-user devices, I do not recommend adding AI next to the sensor (in the same package). That’s because designers continue to use the ASIC for signal conditioning, so A/D converters are still required. Rather, we should look to edge gateways to carry the majority of the workload, including deep learning, because this reduces system complexity and power consumption.SEMI: Why are smarter sensors shifting data processing and analytics to the edge of IoT devices?DING: Data processing and analytics are very important for IoT devices, but we need to focus on understanding the data, parameter calibration and more. The MEMS sensor industry should leave big data analytics to edge computing and cloud computing because AI requires deep learning, demanding a huge amount of data.The challenge is to find the sweet spot for data processing right next to the sensor element.SEMI: What is China’s evolving role in innovation in MEMS sensors for IoT devices?DING: At present, the MEMS community in China needs to figure out how to innovate instead of copying existing technologies, a low-margin business that will not help to grow the industry. One reason why I am so pleased to see the MSIG Conference on AI+IoT in China is that it will encourage greater creativity in the MEMS community in China, and this will ultimately lead to Chinese companies and R D institutions leading innovation rather than copying it.SEMI: What is the right approach to combining smart MEMS sensors with AI in IoT devices? Why is this important for both domestic Chinese and international markets?DING: Combining data from sensors with cloud-edge computing is the right approach. As sensor companies increasingly provide end-to-end solutions, such as “sensor+ firmware + SaaS + app,” we will realize easier and faster integration of sensors in IoT applications.This is incredibly important because China today is the world’s biggest market for IoT hardware. China has 2,000-plus design houses, 200-plus OEMs and thousands of distributors. That said, we still see a highly fragmented market that will benefit from a faster integration methodology.Faster integration of MEMS sensors and AI/machine learning for IoT hardware will benefit designers in international markets as well.SEMI: What do you hope MISG Conference on AI+IoT attendees will take away from the forum? DING: MEMS sensors are highly fragmented, reflecting the highly fragmented applications in which they play. The MEMS sensors industry should figure out how to provide one-stop-shopping solutions for vertical markets. This will speed the scalability of applications and expedite the growth of sensor production. Sean Ding (柯镇) will moderate Brave New World - MSIG Conference on AI+IoT 2019 at SEMICON China on Wednesday, March 20, 2019, at Kerry Hotel Pudong in Shanghai, China.This conference has been organized by the MEMS Sensors Industry Group (MSIG). Register today to connect with Sean Ding and featured speakers at the event.Speakers at the MSIG Conference on AI+IoT 2019 at SEMICON China include: Welcome and Introduction / 欢迎辞Carmelo Sansone, Director, MEMS Sensors Industry Group (MSIG), a SEMI technology community AI Needs Accurate Data – MEMS Sensors Can Provide It / MEMS传感器为人工智能提供真实数据Andrea Onetti, Group VP of Analog MEMS Group, GM of MEMS Sensor Division, STMicroelectronics Enhanced IoT Edge by Smart Sensors / 智能传感器助力IoT边缘智Bennini Fouad, Regional President Asia Pacific, Bosch Sensortec Horizon AI Processor Solution, Enable Industries in AI Time / 地平线AI芯片解决方案，赋能千万业Carl Zhang 张永谦, General Manager/VP, Smart Chip Solutions Division, Horizon Robotics Inertial Sensors in AI Applications / 运动传感器AI应用案例Ben Lee 李彬 , CEO, mCube Ultra-Low-Power Solutions: an Ecosystem Approach / 超低功耗的生态链解决方案Carlos Mazure, IEEE Fellow, Chairman Executive Director, SOI Industry Consortium High-Integrity, Fault-Tolerant Open Inertial Measurement Platform for AI-based Vehicle Automation / 适用于人工智能车辆自动控制的高集成及容错的惯性测量开放平台Dan Dempsey, Senior Director of Automotive, ACEINNA Maria Vetrano is a public relations consultant at SEMI.

As group vice president of the Analog MEMS Group and general manager of the MEMS Sensor division at STMicroelectronics, Andrea Onetti brings nearly three decades of experience in MEMS, sensors and audio systems to his leadership role at one of the world’s most successful electronics and semiconductor manufacturers. During his keynote at FLEX and MEMS Sensors Technical Congress 2019, February 18-21 in Monterey, Calif., Onetti will address the criticality of sensor accuracy in advancing automotive, industrial and consumer applications. SEMI’s Maria Vetrano spoke with Onetti recently to give FLEX/MSTC attendees a preview of his presentation. SEMI: What are some promising advancements in sensors for autonomous cars? Onetti: The avionics industry is already successfully applying sensors for autonomous operationl. Inertial navigation systems (INS) support the operation of planes during flight, both after takeoff and before landing. Unfortunately, the technology in these navigation systems is expensive and not scalable, and they are hampered by reliability limitations in an automotive environment.Following the steady progress that we have made with MEMS inertial sensors in consumer applications, we are on the cusp of realizing greater accuracy in temperature and time – finally delivering the performance required for autonomous driving. Because we can scale in production – we’re now manufacturing more than a billion units a year – we can select the cream of this production crop for adoption in cars. Consequently, we should see Level 3 and Level 4 autonomous driving for consumers very soon.SEMI: How are companies using sensors to monitor and track their assets in industrial applications? Onetti: Predictive maintenance and asset tracking are the two main verticals in Smart Industry. The adoption of multiple sensors for condition monitoring is helping to detect the faulty operation of equipment and to detect early signs of issues that are otherwise difficult to capture. Ultrasonic microphones can detect leaks in a pipe at an early stage, accelerometers with high bandwidth can act as micrometers, and accurate temperature sensors can catch overheating. Similarly, in asset tracking, we use temperature monitoring in combination with inertial sensors to detect problems during the transport of goods. Shock sensors with extremely high full scale (up to 8000g) can tell whether a lightweight envelop has been dropped. Pressure sensors can switch off a radio system when a cargo plane takes off and can mute smart trackers in compliance with flight regulations. We really can do almost anything! A full slate of ST sensors and microcontroller units (MCUs) enable WEG’s small but powerful motor sensor, which listens to a motor, feels its pain, and shares that information with engineers, operators and others to diagnose problems before they happen. Image courtesy of STMicroelectronics. High-accuracy motion, environmental and proximity sensors are crucial to VR/AR. Image courtesy of STMicroelectronics. SEMI: How will sensors advance user experiences in consumer electronics, such as VR/AR systems?Onetti: Virtual reality (VR) and augmented reality (AR) are great examples of promising consumer technologies that will become pervasive as performance of inertial sensors improves. First, we need super accuracy in time and temperature to provide the right experience to users. To achieve this level of accuracy, we need a major step forward in performance, and that includes power consumption and miniaturization. Fortunately, we are constantly making progress in the high-accuracy motion, environmental and proximity sensors that are critical to these systems. While the scale is vastly different between VR/AR and automotive, the requirements for AR/VR systems are pretty similar to those that will enable autonomous cars. A growing variety of sensors (environmental, microphone, proximity, motion) – combined with a sensor hub in an MCU – are central to VR controllers (above) and VR head mounted displays (below). Images courtesy of STMicroelectronics. SEMI: We don’t hear much about the criticality of higher accuracy in sensors. Why is improving accuracy in sensors especially important – and what role do calibration routines play in achieving higher accuracy?Onetti: A sensor is more than just the performance of the relevant function. It is also the intrinsic accuracy that it brings. This accuracy is tuned by calibration, which is typically an expensive process done at the end of product manufacturing or – better still – during earlier stages of manufacturing.Today more applications require sensors with higher accuracy, which necessitates investing more time in calibration, leading to higher cost.MEMS technology can help by offering solutions with intrinsic higher accuracy, which reduces the cost of calibration for product manufacturers. This naturally delivers major benefits to OEMs and, ultimately, their customers.SEMI: What would you like FLEX and MSTC attendees to take away from your presentation?Onetti: As attendees explore the wide variety of available sensor solutions for their end products, I would ask them to prioritize the role of accuracy in sensor selection – because improved accuracy means higher quality data, and higher quality data means better decisions with reduced need for data processing.While designers understand the role of calibration routines in qualifying individual components for specific applications, it is the continuous evolution of MEMS technology that offers the best possibility of breakthrough reductions in time and cost of these calibration routines. This makes MEMS sensors more attractive and affordable than similar sensor components based on different technologies. Andrea Onetti will present Accuracy Enables MEMS Sensor Pervasion at FLEX/MSTC on Tuesday, February 19 at 11:00 am.Register today to connect with him at the event. To learn more about STMicroelectronics, click here. Maria Vetrano is a public relations consultant at SEMI.MSTC FLEX 2019 is organized by MEMS Sensors Industry Group (MSIG) and FlexTech.Maria Vetrano is a public relations consultant at SEMI.

Sensors are inextricably linked to the future requirements of partially and fully autonomous vehicles. From highly granular dead-reckoning subsystems that rely on industrial-strength gyroscopes for superior navigation to more intelligent and personalized cockpits featuring intuitive human machine interfaces (HMIs) and smart seats, new generations of partially and fully autonomous cars will use sensors to enable dramatically better customer experiences.Dead reckoning, or, where am I, exactly? Dead reckoning is the process of calculating one’s current position by using a previously determined position, and advancing that position based upon known speeds over a time slice. As a highly useful process, dead reckoning is the basis for inertial navigation systems in aerospace navigation and missile guidance, not to mention your smartphone.Today’s best-in-class MEMS gyroscopes can offer 30-50 cm resolution (this is the yaw rate drift) over a distance of 200 meters — a typical tunnel length where a GPS signal is lost. For semi-autonomous (L3) or autonomous (L4, L5), the locational accuracy is well below 10 centimeters; that’s an accuracy usually reserved for high-end industrial or aerospace gyroscopes with a raw bias instability ranging from 1°/h and down to 0.01°/h. These heavy-duty gyros command prices from $100s up to $1000s. Current performance levels of different gyroscopes by application and performance measure in terms of bias drift (IHS Markit). This poses an interesting potential opportunity for both industrial-performance MEMS-based gyroscope sensor-makers, such as Silicon Sensing Systems, Analog Devices, Murata, Epson Toyocom and TDK InvenSense, and for broader-based sensor component-makers such as Bosch, Panasonic, STMicroelectronics, and TDK (InvenSense and Tronics).While MEMS can master performance, size and low weight, cost remains the challenge. The fail-operational mode requirement for autonomous driving will accommodate higher prices, at least in the beginning, probably in the $100+ range at first, even for the relatively low volumes of self-driving cars anticipated by 2030. Nonetheless, automotive volumes are very attractive compared to industrial applications and offer a lucrative future market for dead-reckoning sensors.Your cockpit will get smarter Automakers are banking on the idea that people like to control their own physical environment. Interiors already feature force and pressure sensors that provide more personalized seating experiences and advanced two-stage airbags for improved safety. In some vehicles, automakers are using pairs of MEMS microphones for noise reduction and image or MEMS infrared sensors for detection of driver presence. Eventually, we might see gas sensors that monitor in-cabin CO2 levels, triggering a warning when they detect dangerous levels that could cause drowsiness. These smart sensors would then “tell” the driver to open the window or activate an air-scrubbing system in a more complex solution. While today’s CO2 sensors are still relatively expensive, we may see them designed-in as lower-cost versions come to market.Future cockpits will need to go beyond such concepts in the lead-up to fully automated driving. Seats could contain sensitive acceleration sensors that measure heart and respiration rates as well as body movement and activity. Other devices could monitor body humidity and temperature.We need look no further than Murata, a supplier initially targeting hospital beds with a MEMS accelerometer as a replacement for pulse oximeters. That same Murata accelerometer could be placed potentially in a car seat to detect heart rate. It’s not the only way to do this: another sensing approach for heart-rate measurement comprises millimeter wave radiation, a method that can even look through objects such as books and magazines.Augmenting sensor-based body monitoring, automotive designers will use cameras to fuse information such as gaze direction, rate of blinking and eye closure, head tilt, and seat data with data gathered by sensors to provide valuable information on the driver’s physical condition, awareness and even mood. Faurecia’s Active Wellness concept—unveiled at the 2016 Paris Motor Show—proves that this technology might be coming sooner than we think. Active Wellness collects and analyzes biological data and stores the driver’s behavior and preferences. This prototype provides data to predict driver comfort based on physical condition, time of day, and traveling conditions, as well as car operating modes: L3, L4 or L5. Other features such as event-triggered massage, seat ventilation and even changes in ambient lighting or audio environment are possible. Faurecia’s “cockpit of the future,” announced at CES 2018. (Faurecia) Meanwhile, there are other commercial expressions of more advanced HMI as well as plenty of prototypes. Visteon’s Horizon cockpit can use voice activation and hand gestures to open and adjust HVAC. Capacitive sensors are already widely used for touch applications, and touchless possibilities range from simple infrared diodes for proximity measurement to sophisticated 3D time-of-flight measurements for gesture control.Clearly, automotive designers will have a lot more freedom with HMI in the cabin space, providing a level of differentiation that manufacturers think customers will appreciate—and for which they will pay a premium.Managing sensor proliferationResearchers are investigating ways to solve the issue of high-functionality vehicles containing myriad sensing inputs, i.e., when we have so many sensing inputs, designers must address wiring complexity and unwanted harness weight. Faurecia, for example, is considering ways to convert wood, aluminum, fabric or plastic into smart surfaces that can be functionalized via touch-sensitive capacitive switches integrated into the surface. These smart surfaces could reduce the explosion of sensing inputs, thereby diminishing wiring complexity. With availability from 2020, Faurecia’s solutions are approaching the market soon.Beyond functionalized switches, flexible electronics and wireless power sources, and even energy harvesting (to mitigate power sources), could provide some answers. Indeed, recent research has shown that graphene-based Hall-effect devices can be embedded in large-area flexible Kapton films, and eventually integrated into panels. OEMs such as Jaguar Land Rover are interested in such approaches to address the downsides of electronics and sensor proliferation, especially in luxury vehicles. While smart surfaces would represent a big change in sensor packaging and a disruption in current semiconductor processes, they remain a long way from commercial introduction.By 2030 or thereabouts, fully autonomous cars that detect our mood, vital signs and activity level could well be available. Cabins could signal us to open the window if CO2 levels become dangerous. HVAC systems could increase seat ventilation or turn up the air conditioning (or the heat) based on our body temperature. Feeling too hot or too cold in the cabin could become a thing of the past, at least for the driver, whose comfort level is the most important! We could feasibly feel more comfortable in the car than in our office, our home or at the movies. Perhaps our car will become our office, our entertainment center and our home away from home as we take long road trips with the family, without a single passenger uttering, “Are we there yet?” Bio: Richard Dixon, Ph.D., is a senior principal analyst for MEMS research at IHS Markit and author of more than 50 MEMS-related consulting and market research studies. He is a renowned expert on automotive MEMS and magnetic sensors used in safety, powertrain and body applications. Along with supporting the overall activities of the MEMS and sensors group, his responsibilities include the development of databases that forecast the markets for more than 20 types of silicon-based sensors in more than 100 automotive applications. In addition, he has supported organizations with future scenarios for sensors in cars and has supported many custom projects for companies in the automotive supply chain.In his prior post at Wicht Technologie Consulting (WTC), Dixon was a senior MEMS analyst where he led research on physical sensors and was the co-author of the NEXUS Task Force Report for MEMS and Microsystems 2005-2009. He has also led commercialization and road-mapping activities on European Commission-funded technology projects, including detailed MEMS chip cost analysis studies.Dixon worked previously as a journalist in the compound semiconductor industry and has five years of experience as a technology transfer professional at RTI International, where he provided business and market intelligence for early-stage technologies.Dixon graduated from University of Greenwich with a degree in materials science and earned a doctorate from Surrey University in semiconductor characterization. He speaks English and German.For more information, visit https://technology.ihs.com/Categories/450486/mems-sensors. ___________________________________________________________________________________________________ Want to hear more from IHS Markit on MEMS and sensors devices and their applications? Top thinkers from IHS Markit will be speaking at upcoming SEMI events. 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