semiconductor wafer fabrication

I recently spoke with Andrew Goh, Vice President at General Manager at Lam Research Southeast Asia, about the importance of the company's new production facility in Penang and its COVID-19 relief efforts. Ng: Before we delve into details, please provide a quick introduction to Lam Research Southeast Asia for our readers who aren't as familiar with your work. Goh: As you know, Lam Research is a leading supplier of wafer fabrication equipment and services to the global semiconductor industry. Since we were established in 1980, Lam has played a key role in contributing to the extraordinary pace of innovation in the semiconductor industry. We have always developed innovative solutions that help our customers build smaller, faster, more powerful, and more power-efficient electronic devices – the kind that are driving the proliferation of technology in our everyday lives.Further to this, we established Lam Research Southeast Asia in 1992 to better serve our customers in this region. We have about 260 employees in both Malaysia and Singapore, with more than two-thirds of them in engineering or technical roles.Ng: Early this year, Lam Research announced a new advanced technology production facility in Malaysia. Please tell us about it.Goh: Yes, Lam Research and the Malaysian Investment Development Authority jointly announced in February 2020 that Lam selected Batu Kawan Industrial Park in Penang, Malaysia as the location for a new advanced technology production facility.Our new state-of-the-art manufacturing site in Penang’s Batu Kawan will open in May 2021 and be the largest in our network. The current plan envisions a 700,000 square-foot facility with expansions already anticipated to serve current and future customers. Construction started in May 2020, and we aim to have our first shipment by 2021. We are currently at our temporary site in Bayan Lepas.Ng: As Lam’s manufacturing site, what role does it play in the larger organisation?Goh: The semiconductor industry is expanding and so are we. To help our customers move the world forward, we need a dynamic, energized team with initiative and focus to help establish our footprint in Malaysia. This has led to the expansion of our existing global production footprint with locations in the United States, South Korea, and Austria. As the industry moves forward, we at Lam Manufacturing Malaysia will work on the entire portfolio of our leading-edge products, collaborating closely with customers to create some of the world’s most sophisticated processes and fabrication equipment. We chose Penang for its talented workforce with experience in aerospace, health sciences manufacturing and other high-tech fields. We are currently hiring now for our site in Penang. Anyone interested in exploring job opportunities at the site can send learn more and apply at www.MakeAtLamPenang.com. Artist's rendering of new Lam Research production facility at the Batu Kawan Industrial Park in Penang. Ng: With the world now thrown into an unprecedented situation, do you expect any delay in the construction schedule?Goh: Despite the COVID-19 pandemic, construction began in May 2020. We still expect to make our first shipment from the Batu Kawan factory around mid 2021, in line with our initial estimates. Close cooperation with and timely support from MIDA and Invest Penang have allowed us to stay on track.Ng: How has Lam done supported COVID-19 relief or recovery efforts during this pandemic?Goh: Just as with any other business, this pandemic indeed is a trying time for all of us around the world. We announced on April 8 that we are donating $25 million to global COVID-19 relief and recovery efforts, which includes relief funds to employees, employee benefit resources, and additional support for the areas in which we operate. This support includes supplies for hospitals, both short-term and long-term community assistance, and our 2-for-1 gift matching for eligible COVID-19 relief programmes.In addition to the fund, we have also donated our surplus inventory of masks for immediate relief to local hospitals. At the same time, our innovative engineers and others with 3D printers at home have begun developing prototypes and printing protective face shields.Consistent with current guidance from the U.S. as well as the region’s respective Centers for Disease Control (CDC) and World Health Organization (WHO), we have activated our business continuity plan (BCP) to safeguard the health and well-being of our employees and their families, as well as to mitigate business disruptions to our customers. Measures we've implemented include strict social distancing, quarantine measures and travel restrictions.Bee Bee Ng is president of SEMI Southeast Asia.

The ESG MarketElectronic Gases represents the largest percentage of the spend on chemicals and materials by semiconductor producers. Taken altogether, the spend on Electronic Gases was almost $6 billion worldwide in 2018. Recent critical shortages of key gases have impacted the industry tremendously and, in some cases, has also limited output. The Electronic Specialty Gas (ESG) market, while a small segment of the global gas market, is one of the most complex and least understood market segments of the electronic chemicals and materials landscape. Linx Consulting estimates that the ESG market totaled nearly $3.4 billion in 2018, up from roughly $3.1 billion in 2017 with a growth rate of 10 percent last year. Growth was driven by rising demand and the increasing use of higher-value products in applications such as etch and specialized deposition. ESGs are used in the manufacture of electronic devices that are subsequently assembled in systems and in a variety of processes such as film deposition, film etching, substrate doping and chamber cleaning. The devices – semiconductors, LEDs, and displays – are processed on larger substrates, and then separated before assembly.Key differentiators for ESGs are not only the technical complexity of the gases and mixtures supplied, but the purity and consistency demands placed on the gas supply. Product purity and consistency, often at the limits of analytical capability, must go hand in hand with rigorous application of statistical process control in manufacturing and absolute delivery reliability. ESGs include fluorocarbons, hydrocarbons, deposition precursors, dopants, corrosives (halides/hydrates) and rare gas mixtures.The key end-use markets for ESGs include semiconductor wafer fabrication, flat panel display (FPD) manufacture, compound semiconductors / LEDs production and Photovoltaics cell manufacture, as illustrated below in Figure 1. Figure 1 - ESG Market by End-Use Applications Source: Linx Consulting The semiconductor industry is the largest user of ESGs and has the most diverse ESG requirements in terms of products, package sizes and purity requirements. The semiconductor industry uses all the different specialty gases produced. Purities are typically 4N and above and the packages can range from small cylinders to tonner/Y packages to tube trailers. The ESG market is global, with key demand centers in China, Europe, Japan, Korea, Southeast Asia, Taiwan and the United States. The Flat Panel Display (FPD) community is the second largest user group for ESGs. However, the breadth of ESG products used in FPD fabs is much more limited than in the semiconductor industry. Key product applications include silicon sources, dopants, oxidation and nitridation sources, chamber cleans, and etchants. ESG use has grown with the development of the FPD industry across both TFT-LCD segment and AMOLED segment, with many large end users in Korea, China, Taiwan, and Japan. Korea and China boast large ESG supply infrastructures geared towards serving the FPD industry. Early on, these countries targeted the development of the FPD industry and the associated value chain, so there has been large-scale development of required ESG products such as NF3 and silicon precursors. When we review the markets in aggregate, coupled with the geographic intensity of the electronics industry in Asia, it is unsurprising that a vast majority of the ESG market would be in Asia, as illustrated in Figure 2, below.Figure 2 - ESG Market by Key RegionSource: Linx Consulting Key ApplicationsThe applications for ESGs can be readily tied to major thin film fab processes that are commonly used in the microelectronics industry. The processes include dielectric and metal etch, dielectric deposition, metal deposition such as titanium or tungsten, deposition of non-silicon materials such as hard masks etc., dopants for thermal diffusion methods and ion implantation, reactor chamber cleaning; as well as some other specialty applications. This is illustrated in Figure 3 below. Figure 3 - Applications for ESGsSource: Linx Consulting Clearly there is a close tie-in for ESGs into thin film deposition (CVD and chamber cleaning) and etch processing. In the future, the industry will increase its use of ESGs with novel deposition and etch processes. New applications may include lower temperature deposition, high deposition rate processes, flowable CVD films for high aspect ratio structures, and high selectivity deep etching with greater uniformity. All these processes improve device performance and will rely on ESGs and rare gases as enablers. Outlook for ESGsOverall, we believe that the ESG market will grow at a compound rate of about 6 percent over the next five years. Currently the largest six suppliers – Versum Materials, SK Materials, MTG/TNS, Air Liquide, Linde/Praxair, and KDK – control about half of the overall market, with about 50 suppliers accounting for the other half of the market. We anticipate that as the industry continues to grow, we will continue to see changes in the supplier base with both continuing consolidation and new regional suppliers emerging as unique technologies and value-added capabilities enter the market.For More InformationThis article is based on insights and analysis from Linx Consulting’s Electronic Specialty Gas report. The annual report is considered the leading industry source for comprehensive information about demand for specialty gases used in the electronics industry. We track more than 60 different ESG products used across the global semiconductor, flat panel display, solar and compound semiconductor industries.For more information, please contact [email protected], or Mike Corbett at +1 973 698 2331, Mark Thirsk at +617 273 8837, or Andy Tuan + 886 952 111222, or visit Linx Consulting.Interested in engaging with the electronic materials supply chain? The Electronic Materials Group (EMG) is a SEMI technology community representing SEMI member companies that provide substrates, polymers, metals, organic and inorganic materials, chemicals, and gases developed for electronics manufacturing. Linx Consulting has been a longtime member and supporter of the SEMI Electronic Materials Group.Mike Corbett is managing partner and Andy Tuan is managing director, Asia, at Linx Consulting.