ST Microelectronics

The latest MEMS and sensors advancements in markets ranging from displays to biotech and in key areas of manufacturing including sensor devices and fabrication came into sharp focus at the 2022 MEMS & Sensors Technical Congress (MSTC) in late April as 120+ industry experts gathered in Berkeley, CA.

To help build the MEMS and sensors industry’s understanding of the Smart City challenges facing city technical and management personnel (and their integrators), MSIG held an invitation-only Sensorize Your City workshop for sensor device manufacturers and integrators on April 5 in Columbus OH.

The increasing complexity of IC manufacturing poses a number of challenges including the mask data preparation required to enable technology improvements such as multi-beam (MB) mask writers and extreme ultraviolet (EUV) lithography. Thiago Figueiro, VP of Sales & Marketing of Aselta weighs in.

MEMS actuators transform electronic signals into something that can be sensed or touched by the end user of an electronics device. A case in point: MEMS actuators such as print heads in inkjet printers transform electronic files into text or beautiful images. In 3D printers, actuators can produce real objects. Inside smart glasses, tiny MEMS mirrors can create virtual objects. Little surprise, then, that integrating these powerful devices into the end products is a multidisciplinary enterprise. STMicroelectronics has been successfully leading the deployment of dedicated MEMS actuator solutions with customer products in various market segments. SEMI spoke with Anton Hofmeister, group vice president and general manager of the MEMS Actuator Division at STMicroelectronics, about MEMS actuator trends. Hofmeister shared his views at the SEMI MEMS Imaging Sensors Forum as part of the virtual SEMI Technology Unites Global Summit. Watch the STMicroelectronics’ presentation on-demand until March 26, 2021. Registration is open. SEMI: What is the difference between MEMS devices that sense and MEMS devices that actuate? Hofmeister: MEMS sensors gather data from the world around us including motion, pressure and air temperature and transform them into an electrical signal. Actuators work the other way round. They receive an electrical signal and transform it into some well-controlled actuation such as ejecting a fluid, moving a membrane or deflecting a laser beam. SEMI: How can MEMS actuators’ integration be simplified to be embedded in new applications so they appeal to consumers? Hofmeister: The challenge of integrating MEMS sensors into devices has been simplified by demo kits and evaluation boards, which customers use to embed the sensor into a system. MEMS actuators are more difficult to integrate. They often power the core function of a system and therefore require deep system understanding. Reference designs are a big step forward in simplifying integration. My presentation at the SEMI MEMS Imaging Sensors Forum showcased some examples. MEMS micro-mirror projection for augmented reality (AR) glasses is an example of a complex system that requires multiple types of components to function. Together with several partners, STMicroelectronics recently announced the LaSAR Alliance, which will develop reference designs to enable the AR glasses market. SEMI: MEMS sensors and actuators are considered the backbone of many consumer products. Are MEMS actuators also mostly used in automotive? Hofmeister: The widest use of MEMS actuators has so far been in print heads for inkjet printers. In recent years, we have seen actuators adopted in emerging applications ranging from piezo heads for 3D printers to MEMS mirrors for laser beam scanning systems or 3D sensing solutions for consumer applications. The first high-volume application in automotive will likely be MEMS mirrors for LIDAR systems. SEMI: What market growth trends do you see for MEMS sensors and actuators? Hofmeister: The sensorization trend, which aims to collect data from homes, cities, factories, cars and personal devices, continues to drive the adoption of sensors and actuators for a wide variety of applications. While the last wave of MEMS growth was triggered by one end product – the smartphone – the next wave will be driven by multiple applications and use cases in industrial, medical, automotive and personal electronics. SEMI: How can technology unite us? Hofmeister: In recent months, we have all experienced vividly how vital technology has become. MEMS, and semiconductors in general, are an integral part of many products and services that make our lives easier. Communications technologies have been particularly important during this pandemic, whether using the personal devices as our interface to the digital world or the complex infrastructure that they operate through. I hope that my participation at the summit helped increase awareness of the new possibilities and opportunities that technologies like MEMS actuators have to offer to create products and services that further improve people’s lives. Anton Hofmeister is group vice president at STMicroelectronics, general manager of the company’s MEMS Actuator Division and managing director of its German subsidiaries. Hofmeister has been with STMicroelectronics for more than 30 years, working in Germany, France, the U.S. and Italy. He has held managerial positions in key account management, product and strategic marketing, advanced R D and general management. For the past 10 years, he has managed various product divisions in the MEMS sector. Hofmeister has also served as a board member of the Singapore-based molecular diagnostics company Veredus Laboratories. Serena Brischetto is senior manager of Marketing and Digital Engagement at SEMI Europe.

Making Strides TogetherKnowledge is power – especially when it is shared. This principle formed the foundation for Micron’s Go and See virtual visit of its Singapore manufacturing plant on 26 August 2020 as 27 companies including GLOBALFOUNDRIES, ST Microelectronics, Infineon, TEL, ViTrox , IBM, HP and UTAC joined the first-of-a-kind virtual factory visit. The chip industry powerhouses gathered to see how Micron’s Lighthouse frontend wafer fabrication facility leverages Fourth Industrial Revolution technologies to drive new production and cost efficiencies.They saw clear markers of a transformed organisation and spoke with working-level staff, managers and front-line employees. Company representatives also met virtually with Micron management teams from organisations that led its digital transformation – from pilot programs to integration at scale – to realise significant financial and operational benefits. The mix of technologies they deployed to make it all happen included artificial intelligence (AI), big data analytics and the Industrial Internet-of-Things (IIoT).Micron’s Singapore-based fab facility earned Lighthouse certification earlier this year from the World Economic Forum’s Global Lighthouse Network. The Go and See tour was co-sponsored by SEMI Southeast Asia and McKinsey Company.Transformation is CrucialBy embracing Lighthouse principles, semiconductor sectors and companies can accelerate their digital transformation to boost operational and financial efficiency while helping increase productivity across the electronics supply chain. It will take time for Southeast Asia semiconductor manufacturers to transform to digital operations, though we’re seeing growing interest in Industry 4.0 practices as they begin to understand that the deployment of new technologies and applications will help them better understand real-world benefits of smart manufacturing use cases and solutions. SEMI believes shining the spotlight on companies like Micron can illuminate the way forward for other companies to help drive the industry’s digital transformation. We look forward to seeing companies build on this momentum as they start to leverage leading-edge technologies to improve efficiencies and promote sustainability.Bee Bee Ng is president of SEMI Southeast Asia.

Despite market saturation and stagnation saddling many business sectors, MEMS remains a shining star in the semiconductor industry. Opportunities in automotive, consumer electronics, mobile, medical are rising. What is supporting this industry growth? Who are the big players on the horizon?SEMI spoke with Dimitrios Damianos, Technology Market Analyst, Photonics, Sensing and Display division at Yole Développement, about MEMS market dynamics and future trends. Damianos shared his views ahead of his presentation at SEMI MEMS Imaging Sensors Summit, 25-27 September, 2019, at the WTC in Grenoble, France. Join us at the event to meet experts from Yole and many other key industry influencers. Registration is open.SEMI: MEMS and sensors is one of the healthiest industries not only in Europe but globally. Despite a global economic slowdown, the MEMS and sensors is still growing. What is fueling this growth?Damianos: The value of the global MEMS and sensor market will almost double from $48 billion in 2018 to $93 billion in 2024. In 2018 the MEMS and sensor market represented more than 10% of the total IC market, as more and more MEMS devices and sensors, such as MEMS, image sensors, and RF filters, are integrated in end products in consumer and automotive. In particular, the value of the MEMS-only market reached $11.6 billion in 2018, with consumer applications accounting for more than 60% of the total market. From 2019 to 2024 the MEMS market will grow 8.3% annually in value driven by pressure (for TPMS), RF (for V2X 5G communications), inertial (for ADAS) and future MEMS (such as pMUT for ultrasonic fingerprint) (Source: Status of the MEMS Industry report, Yole Développement, 2019). SEMI: How are MEMS shaping the semiconductor industry today? Damianos: MEMS have a make-smarter enabling capability. They are providing context for new applications and services in transportation, mobility, health, and security. Large companies such as Alibaba and Google are considering MEMS as a critical element in their business solution domains covering the upcoming smart home, smart campus, smart city and smart industry applications. MEMS have key features that correspond to these companies’ criteria for accuracy, small size (without performance degradation), low power and always on (e.g. microphones). Furthermore, with the advent of sensor fusion and edge computing, more sensor data can be processed, maximizing the qualitative and useful information about us and our surroundings. This has a huge impact in all markets, especially consumer.SEMI: MEMS foundries performed well thanks to the boom in industrial and medical applications. Who are the big players right now?Damianos: During 2018, all foundries saw their revenue increase. STMicroelectronics, Teledyne Dalsa, Silex, IMT, Micralyne and Philips Innovation Service are important MEMS foundry players that offer services for various MEMS devices used in medical and industrial markets, among others. On one hand, medical applications were driven mostly by microfluidics, flowmeters, pressure and inertial MEMS. On the other hand, industrial applications were driven by inkjet heads, microbolometers and pressure MEMS. The market prospect, however, is huge for RF MEMS and oscillators that will be used in next-generation 5G infrastructure. SEMI: What is the current status of MEMS for automotive applications? What are the related market drivers? Damianos: In automotive applications, accelerometers and pressure sensors still account for the lion’s share in units. Pressure sensors will grow at more than 8% with Tire Pressure Monitoring System (TPMS) implemented in Chinese vehicles in the near future. After 2019 and 2020, with the new Chinese standard, GB 2614, TPMS will become compulsory: 100% of all new vehicles will have TPMS. Also, automotive MEMS could grow quicker than the corresponding car market (currently at approximately 3%). The reason is a higher number of many different MEMS devices that are being integrated in cars, such as MEMS inertial measurement units (IMUs), TPMS, environmental MEMS for gas and particle monitoring in-cabin and microphones for hands-free voice commands.SEMI: After years of decline, the inkjet heads industry is growing again. What other segments are benefiting from MEMS technology applications? Can you name two examples?Damianos: RF MEMS (BAW filters) is also benefiting from applications in smartphones and will continue to benefit with the arrival of 5G. 5G means additional high frequency sub-6 GHz bands that can only be addressed by BAW filters. Moreover, new infrastructure approach using active antennas will create an expanding market for BAW.Another segment is inertial sensors. Inertial MEMS already have a high potential in wellness and fitness wearables and are gaining support for medical wearable applications to monitor patient activity, with the aim to prevent seizure in cases of epilepsy and other mental disorders. Compared to other types of sensors, MEMS is the golden technology for inertial sensors integrated into medical wearables. They are used for rehabilitation systems, activity trackers and assistance living/fall detection. Specifically, the IMU market will continue to grow for consumer and automotive applications as their price and form factor continue to shrink and they replace traditional standalone MEMS accelerometers and gyroscopes. However, the inertial sensor market will mostly grow for smartphone applications (mostly 6DOF, with 9DOF volumes being comparatively low).SEMI: Give us one prediction about the opportunities offered by the MEMS technology. Damianos: Sensor fusion is becoming more and more relevant since billions of MEMS sensors are made every year. The upcoming 5G revolution will make connectivity easier than ever, creating exponentially more data. To make these data meaningful, data processing is mandatory. Big data is an industry born of recent advancements in AI and machine learning, built upon and fueled by a wealth of new data from ever-expanding sensor applications. An upcoming trend is edge computing, with sensors and MEMS driving a new age of technology. Sensors are digitizing the human experience, and as the real and virtual worlds move closer together, it will be sensors that bind them, enabling new experiences for users everywhere. Running AI at the edge, coupled with sensor fusion, will open new applications for MEMS in audio, motion, olfactometry, and imaging. We also expect that new MEMS devices (microspeakers, ultrasonic fingerprint, pMUT) and piezoelectric MEMS technology could rejuvenate the MEMS market. SEMI: What are your expectations for SEMI MEMS Imaging Sensors Summit and why would you invite your peers to attend? Damianos: SEMI is organizing another very successful event, gathering experts from the Imaging and MEMS industries. We are at a turning point of innovation, with many technological advancements in AI, IoT, AR/VR, biometrics, and other areas where Imaging and MEMS technologies are paramount. Yole is excited to hear the thoughts of many high-profile experts on existing activities and future prospects within their organizations. If you are too, then it is an event that you shouldn’t miss!Dimitrios Damianos, Ph.D. is a Technology and Market Analyst in the Photonics, Sensing and Display division at Yole Développement (Yole). Damianos is a member of a Yole team that produces technology and market reports on the imaging industry including photonics and sensors. Damianos holds a MSc degree in Photonics from the University of Patras (Greece). After his research on theoretical and experimental quantum optics and laser light generation, Dimitrios pursued a Ph.D. in optical and electrical characterization of dielectric materials on silicon with applications in photovoltaics and image sensors, as well as SOI for microelectronics at Grenoble’s university (France). He has also authored and co-authored several scientific papers in international peer-reviewed journals. Learn more! Join the webinar on 5th September 2019. Registration is open! Serena Brischetto is a marketing and communications manager at SEMI Europe.

Over the last three years the number of battery-operated electronic-component solutions for the Internet of Things (IoT) and Industrial IoT (IIoT) applications has been increasing steadily. This trend will continue for years to come, particularly with the growing popularity of mobile devices of all flavors. Addressing power consumption for battery-powered always-on IoT/IIoT devices – which rely on dozens of electronic components, including sensors — is critical to their commercial success.The demand for ultra-low-power sensors has accelerated the race to squeeze every last mW from components. Compared to previous-generations of sensors, semiconductor suppliers have managed to drastically reduce power by as much as 50%-60% over older solutions. Leveraging new state-of-the-art analog design techniques, we have effectively optimized capacitive readings of MEMS structures. How effective are they? We estimate that with the right mix of our company’s power-saving technologies, it is possible our customers could save 3MW/year globally[1].What’s next?While the semiconductor industry continues to investigate novel technologies, approaches and analog IP for greater energy efficiency, we believe that bigger gains in reducing power consumption will come from thinking at the system level. The sensor node is a good place to start.A typical IoT node is composed of a set of sensors, a microcontroller, a radio frequency (RF) link, and a power-supply system, often based on Li-Po batteries.Of these, the microcontroller and RF link consume the most energy and, in the RF link, power consumption is a function of the distance between end point and receiver and of the amount of data transmitted. Thus, at longer distances reducing the amount of data transmitted can save power. We can achieve this by including some pre-elaboration capabilities on-board and by extracting more meaningful information from the raw sensor data.We address this by moving some computation and data analysis inside the sensors, where smart hardware “digital blocks” perform faster and more efficiently than software-based routines running in the microcontroller. We can achieve this by using dedicated hardware resources to reduce overall system power consumption. The beauty of this solution is that it allows the microcontroller to operate in low-power states by only transmitting significant information in batches. The SensorTile development kit can speed up prototyping of ultra-low-power IoT devices by integrating an ultra-low-power MCU and BlueNRG Bluetooth radio with sensors. Some examples of these advanced digital blocks are the Advanced Embedded Pedometer, the Finite State Machine and Decision Tree, and Compressed FIFO in an IMU.The Advanced Embedded Pedometer is a hard-wired step counter that works independently inside the sensor, without CPU intervention: By comparing sensor outputs to pre-defined and -loaded patterns, it autonomously decides whether the user is walking or running to start and stop counting the user’s steps. The sensor then makes this information available to the microprocessor for further elaboration or for simple notification to the user.The Finite State Machine and Decision Tree are new functions dedicated to pattern recognition (machine learning) and decision-making: They can perform complex classifications and state detection, and can send dedicated warning and signaling to the microprocessor. A good real-world example is industrial predictive maintenance, where the sensor can categorize and identify different malfunctioning states in the equipment before waking the microprocessor to react.Our products, on average, save about 1 mA (1e-3) over competitive devices or over our previous-generation parts. So 2.0 x 1e-3 x 1.5e9 = 3MW. Programmable Sensor and Decision Tree Finite State Machine Integrating programmable sensors and decision trees as well as finite state machines in the sensor allows the sensor to do more of the work while the MCU sleeps. Source: STMicroelectronics Another example is compressed FIFO (first-in, first-out) buffer, which can store sensor data in the sensor, not in raw format, by using efficient compression algorithms. In addition to saving memory (and therefore silicon area) inside the sensor chip, it also saves power by reducing the number of bytes transferred to the processor and by shortening the communication data flow, which reduces processor-active time.These examples – the Advanced Embedded Pedometer, the Finite State Machine and Decision Tree, and compressed FIFO buffer – are just some showing that we can develop low-power IoT/IIoT devices through intelligent management of sensors, microcontrollers and other components in any given system. Your starting point is an IoT/IIoT node that lets you selectively allocate some power-hungry tasks — such as computation and data analysis — to sensors instead of the microcontroller. Leveraging data blocks that reside in the sensors alleviates the microcontroller’s typical power drain, allowing the microcontroller to operate with maximum efficiency.[1] ST sells about 1.5 billion pieces/year (1.5e9), which typically run from a 2V supply. Luca Fontanella joined ST Microsystems in 1995 as an analog designer. In 2001 he joined the MEMS team in a marketing role and today he is marketing manager in the MEMS Sensor Division. Luca has contributed to 25+ international patents and has presented at multiple conferences. He earned a degree in Electronic Engineering from Padua University. Simone Ferri joined STMicroelectronics in 1999 as Central R D engineer, moved to the Audio Division as a digital designer and is now director of the Consumer MEMS Business Unit. He holds a degree in Electronic Engineering and an MBA from the Polytechnic of Milan. _______________________________________________________________________________________________Brush up on the latest MEMS and sensors trends and gain a new perspective on emerging applications. Register today!