Technology Unites Global Summit

With each transition to a new technology node, fab requirements for metal and particle contamination become more stringent, posing challenges for existing coating methods such as anodization or plasma spray that may not provide complete protection against contamination especially on critical chamber components with complex geometry. SEMI spoke with Beneq business executive Sami Sneck about common metal and particle contamination issues with critical chamber components, coating methods to protect against corrosion, and properties to look for when selecting the optimal protective coating solution. Sneck discussed the unique benefits of atomic layer deposition (ALD)anti-corrosion coatings with Aluminiumoxide (Al2O3) and Yttrium Oxide (Y2O3) and offered recommendations on how to work with original equipment manufacturer (OEM) partners to design, test and implement an ALD coating solution for semiconductor equipment. To learn more, visit Beneq at its digital booth at SEMI Technology Unites Global Summit, available on-demand until March 26, 2021. Registration is open. SEMI: How does ALD compare with other coating methods such as anodization and plasma spray? Sneck: ALD enables conformal dense and pinhole-free coatings on complex shapes. We can deposit various ALD coating materials on parts made of various materials. All other coating techniques have limitations. For instance, anodization is conformal, but porous and is suitable for Al2O3 used for aluminum parts. Plasma Spray is a line-of-sight method and not conformal on complex shapes, such as holes in showerhead parts. SEMI: Which substrate materials work for ALD coatings? Sneck: In general, parts made of common metal materials, such as aluminum, stainless steel or titanium, all work well with ALD coatings. Commonly used ceramic materials work well with ALD too. Plastic materials need to be coated generally at a lower temperature, which limits the coating material selection, but materials such as Al2O3 can be applied as well. SEMI: What is the maximum coating thickness you can reach with ALD? Does this depend on the material? Sneck: Yes, indeed. The maximum coating thickness does depend on the material of the part that we are coating. Polymer materials for example, have a very large coefficient of thermal expansion, which limits the practical coating thickness to the 100-nanometer level. On metal and ceramic parts, coatings of several micrometers are possible too. Typically, ALD coating thickness on chamber components range from a few hundred nanometers to one micrometer. SEMI: Which aspect ratio can you coat with ALD? Sneck: Basically, ALD can coat aspect ratios of 1000:1, but this would be extremely slow. In practice, some of the most complex parts are showerhead parts with small holes. Typically, these have an aspect ratio of around 100:1, which is perfectly commercially feasible for ALD. An extreme example would be gas lines: In this case, the aspect ratio may be also around 100:1, but the physical distance from one end to the middle may be half a meter. In this respect, it is not practical to wait for gas diffusion to reach such a depth level. Instead, the gas lines can be coated by forcing the ALD precursor gas flow into the gas line parts. This works well but needs part-specific manifolds to guide the gases. SEMI: What is the lifetime of ALD coating compared to other coatings? Sneck: ALD coatings differ from other coatings a couple of ways. First of all, ALD coatings generate less particle contamination since they are non-porous. Secondly, and most importantly, ALD coatings can cover areas that other coatings cannot. What is considered the lifetime of a certain part depends on various factors. Ultimately, the lifetime needs to be confirmed by testing parts in actual process chambers by running a lot of wafers through the chamber and monitoring critical parameters such as particle level and yield. SEMI: If you have multiple shelves with parts in the reaction chamber, how does the shelf position affect the coating uniformity? Is center shelf better than top and bottom shelf? Sneck: Uniformity depends on many parameters, including the part geometry, part holder geometry, batch size and coating material. When the shelves supporting the parts are optimally designed and the gas flow is well-distributed to all shelves, all shelves from top to bottom show similar uniformity. SEMI: Is there any risk of cross-contamination? Sneck: Cross-contamination could potentially be caused by the parts themselves or by different coating materials. The batch setup is fixed in production use, which means the parts are the same in every batch. The only variation is that the batch may not be full in some cases, but then we do not fill the empty part of the batch with other parts that could cause contamination in order to prevent contamination from one part type to another. Cross-contamination from one coating material to another is not a usual concern but can be prevented by using dedicated reaction chambers for different coating materials. This is very easy to do with Beneq P800. Sami Sneck manages Beneq’s semiconductor part coating business. He joined Beneq in 2005 and since then has held various professional and management positions including product manager, application manager, director of ALD group, head of sales, and head of Asia. He earned his MSc degree in Chemical Engineering in 2001 from Helsinki University of Technology. Sneck has special expertise in Atomic Layer Deposition technology and business development. He has played a vital role in introducing various ALD production concepts and solutions to several industries ranging from jewelry to photovoltaics, electronics and semiconductors. Access the free webinar recording and discover the latest anti-corrosion coating solutions and the unique benefits of ALD (atomic layer deposition). This webinar is particularly helpful for process engineers, equipment engineers and others responsible for contamination control and equipment yield. Serena Brischetto is senior manager of Marketing and Digital Engagement at SEMI Europe.

SEMI spoke with Andreas C. Zimmer, Executive Search and Selection Consultant at ZIAN Co industrial consulting and recruitment, about strategies for attracting and retaining talent and promoting careers in semiconductor industry. Zimmer shared his views ahead of his presentation at the SEMI Fab Management Forum, 17 February, as part of the SEMI Technology Unites Global Summit, 15-19 February 2021, an online event. Join us to meet experts from ZIAN Co. and other key industry influencers. Registration is open. SEMI: What makes the semiconductor industry such a great career destination? Zimmer: The semiconductor industry is an interesting world for anyone involved in or just fascinated by high-end technology. But if we think about our mobile phones, personal computers or cars, we should all ask ourselves what technology is behind these devices we use in our daily life. The classical Newtonian physics does not reveal the source of the pixels in our mobile phones or why a navigation system knows where I currently am and how I’m supposed to drive to avoid the traffic jam ahead. The semiconductor industry truly is the technological pacesetter. The technologies and applications developed by SEMI and its members are the multipliers directly impacting our daily life. Moore's law not only affects the development of chips themselves, but also how we use the applications and devices they enable. Think about the size-performance ratio of modern smartphones compared to the first- and second-generation devices in the 1970s and 1980s, or compare today's BMW with one from the 1960s. The problem is that the industry is too hermetic. We perceive a lack of willingness to go out and tell in a generally understandable way what this industry is all about! Everyone knows Apple, Samsung, Nokia, but who, besides the specialists, knows NXP, Infineon, TSMC or LFoundry? Many companies are largely unknown to the general public! So why should a graduate from a technical university choose a company such as Applied Materials, TEL or ASML? During their studies students will inevitably have come in touch with IC or MEMS companies, but do they also know what is behind them? Do they really know the value chain that leads to the end product? SEMI: What can the chip industry do to better attract talent? Zimmer: Our industry is extremely attractive for anyone who is interested in technology and would like to push things ahead, but unfortunately access to this industry is almost reserved to the initiated who, in whatever way, came in touch with the industry at some point. Let me get this straight: This is not a conscious, willful attitude. It is just the result of our industry’s hermetic attitude. In my opinion, there is no overarching, uniform strategy in marketing, communications or advertising to promote the potential of the semiconductor industry to a wider audience. That’s why SEMI and the cooperation of its members in attracting talent is essential. SEMI: What concrete actions do you suggest for attracting and retaining talent? Zimmer: In German there is the saying “Do good and talk about it!” – and this is exactly what should be implemented. It is not enough to place an ad when necessary, to promote something here and there, perhaps to sponsor a chair or to provide a device free of charge. These are certainly all reasonable actions, but rather random and not long-term or strategic. Furthermore, these actions will reach only a relatively small group of people. The industry should organize structured recruitment activities under a long-term plan, over 10 years or even extending to the next generation. This shouldn't be a rigid corset, but rather a guideline closely informed by the chip industry’s technology roadmap and companies across the supply chain. If it is the task of an organization’s board and the management to define the strategic direction and to set specific goals, it should be the task of technical management to ensure that these goals can and will be achieved. However, this will only succeed if human resources is involved from the very beginning and can plan appropriate personnel resources accordingly. Employees retire, quit and change employers. New materials, technologies, applications and processes are being developed and require new, specific knowledge. Market requirements change. All of these components need to be recognized and considered in early planning. SEMI: What is your experience as a consultant? Zimmer: As consultants, we experience how organizations literally fall out of the clouds when the situation within the organization itself drastically changes, because a strategically important colleague is retiring or suddenly leaving the team for whatever reason. Then, quite surprisingly, the question “Where and how quickly can we find the suitable replacement?” arises. Instead, that departure should be considered as a possible development up front in overall talent planning – a plan B to keep in the drawer. Developing and implementing a long-term HR development roadmap, aligned with the technology roadmap, enables a company to anticipate when specific resources are needed, identify the right people and get them onboard without gaps. It is also important to keep your team informed and involved in all decisions and process changes, and to make sure they get the respect and appreciation they deserve. Employer-employee cooperation over the long term only works when the relationship is a win-win for both parties. If an organization sees the relationship as one-sided to its exclusive benefit, sooner or later the worker will be terminated or quit at the expense of the organization. Truly live the statement “Our people are our best and most valuable resources!” SEMI: When should organizations start attracting young talent? Zimmer: The sooner, the better! Communications aimed at attracting future employees should be designed to reach people of all ages and levels of education. For many years, the tobacco industry targeted young people by demographic, considering their age, education and cultural mindset to ensure they perceived cigarettes as cool. The result? Many people became addicted, mostly for life, just because some clever communications expert touched the right spot! Our industry will not attract teenagers like tobacco corporations did, but the strategy is basically the same: arouse the curiosity of your target group and speak their language. A possible scenario: A company starts and establishes a relationship with neighboring technical, middle and high schools by providing equipment, documentation, and employees who serve as teachers or coaches, and organizing guided tours, seminars and workshops in coordination with the school management. The cooperation continues with the university, where the respective chairs are supported and financed. With a little creativity there are endless possibilities! In our day-to-day business, we observe that large, well-known companies such as Bosch and Daimler are practically sitting on the lap of students in key universities and institutes, yet are unable to identify talent very early and bind them to their company. SEMI: How can organizations capitalize on shifting retirement patterns to help narrow their talent gap? Zimmer: The answer to this arises from considerations related to personnel planning in connection with a company’s technology roadmap. If the roadmap is linked to HR plans, you automatically have an overview of the time-critical moments when personnel gaps might arise. Then you can easily close these gaps, for example by arranging the onboarding of a successor for a specific position long before the job holder leaves. Considering notice periods and approval processes, a period of at least two years should be planned in order to be prepared for personnel changes. Of course, much of this varies depending on the importance of the position to the organization and the size of the talent pool. For example, it will probably be easier and faster to hire and train a sales engineer than the successor for a development manager, when you know there are maybe only 10 people worldwide who are, professionally speaking, at his level. And this is equally true for internal promotions: Always keep an eye on your own people and try to discover their greatest talent! Senior people tend to look outside the organization rather than just around the corner. Maybe the right talent is sitting next to you. Stay tuned and talk to your people to implement a strategic knowledge transfer as part of your organizational culture. Another aspect that is often overlooked is the deputy function: We often find functions in organizations that literally have a unique selling proposition. But there is no deputy, no one who can step in case of an emergency, because no other colleague possesses the knowledge and information to take over if necessary. Usually this is not a problem during a vacation or illness, but what do you do if a key job holder suddenly cannot work from one day to the other? SEMI: What is the role played by artificial intelligence? Zimmer: AI is both a risk and an opportunity. A new technology can always mean danger if it is used incorrectly, and I am not talking about job losses! This has always proven to be a mistake in the past. On the contrary, new technologies create new jobs! New technology accelerates communication, creates new platforms for interaction, shortens decision-making processes, and turns the world into a small village. In your interview with David Meyer CEO of Lynceus, he hits the nail on the head: The great advantage of AI in our industry is likely to be the management, handling, analysis and drawing of conclusions from an incredible amount of information at an unbelievable speed. Without AI, information cannot be controlled to this extent, not to mention accurately evaluated in real time. The mastery of these processes and the learning curve that results from them – for example for the determination of quality levels – should set completely new manufacturing standards. SEMI: How can technology unite us? What do you expect from your participation at SEMI Technology Unites Global Summit? SONAR GmbH has been in this industry as a personnel and business consultant firm for 25 years now. We have experienced many pig cycles since 1995 and accompanied our customers through all the ups and downs, only to have learned one thing in the end: The semiconductor industry is unfortunately still too fixated on technology and overlooks the fact that this technology is made by people for people. The EU's latest Pact for Skills, which was presented at end of November 2020 by Commissioners Schmidt and Breton, foresees 2 billion € investment to generate 250,000 new jobs in the electronics industry throughout Europe! In 2013, we aimed to sensitize semi industry executives, managers and CEOs to the importance of human resources to the well-being and success of organizations. It’s vitally important to invest in day-to-day relationships with your employees to foster their careers and address their needs. The SEMI Fab Management Forum will feature leading game changers of semiconductor operations to highlight best practices for achieving sustainable operations beyond 2020 and exploring the latest solutions for smarter tools and smarter processes. Andreas C. Zimmer is executive search and selection consultant at ZIAN Co industrial consulting and recruitment, specializing in recruiting talent for high-end technologies in areas such as LED, PV, semiconductors, electronics, and test and measurement. A personnel and industrial consultant with more than 20 years of experience, Andreas is active throughout Europe, the United States and Asia. For more insights about workforce and skills strategies, please see SEMI Workforce Development activities and the European METIS project. Serena Brischetto is senior manager of Marketing and Communications at SEMI Europe.

The recent global pandemic redefined well-established paradigms in healthcare. The classic model involving frequent hospital visits is no longer viable due to the risk of contagion. The focus is now on remote and pervasive vital sign monitoring solutions and automated data processing for health assessment. Social-distancing-friendly technologies, such as wearables, implantables, insertables and ingestables that enable long-term monitoring, can help detect medical abnormalities both in individuals and large populations. SEMI spoke with Carlos Agell, program manager and principal member of Technical Staff at imec, about remote vital sign monitoring using innovative form factors and methodologies. imec’s healthcare technology vison for remote care systems will be the focus of Agell’s presentation at the SEMI MedTech Forum, 19 February, as part of the SEMI Technology Unites Global Summit, 15-19 February 2021, online event. Join us to meet experts from imec and other key industry influencers. Registration is open. SEMI: What is driving innovation in diagnostics and what is the role played by the semiconductor industry? Agell: There is a clear need for remote diagnostics triggered by the COVID-19 pandemic. Two examples are respiration monitoring and SARS-CoV2 testing technologies. The fact that some of the more obvious symptoms of COVID-19 are respiratory has revealed a big gap in medtech: the need for low-friction, ambulatory, continuous and pervasive respiratory monitoring solutions. At imec we have been working on bioimpedance-based technologies (from chipsets to smartphone-enabled sensing devices) that can provide feasible solutions in that space. Hence, novel sensing modalities from the semiconductor industry can make a difference when it comes to remote ambulatory respiratory monitoring. On the other hand, SARS-CoV2 diagnostic technologies have become paramount during the health crisis. In this space there is a clear need to simplify, speed up and lower the cost of testing. Additionally, from a practical perspective society needs to prevent virus spreading. imec is spearheading an innovative semiconductor-based solution aimed at simplifying SARS-CoV2 testing by collecting aerosols from subjects’ breath using a silicon-based solution for analysis using the polymerase chain reaction (PCR) method, the gold standard in COVID-19 testing. Determining viral load in exhaled breath is a clear indicator of infectiousness, and detecting subjects with a high viral load is key when developing these rapid tests to facilitate economic recovery. A cost-effective and speedy though reliable SARS-CoV2 testing solution opens up possibilities for its use as gating mechanism (such as testing to allow access to facilities and prior to boarding a plane) to help jump-start some of the hardest-hit sectors in the economy, such as travel and hospitality (hotels and restaurants) by enabling more in-person interactions. SEMI: Please share more about imec’s commitment to improving the healthcare sector. Agell: imec R D is active in the field of remote unobtrusive respiration solutions, which are vital in treating respiratory system conditions such as asthma, chronic obstructive pulmonary disease (COPD) and COVID-19. These solutions rely on a combination of silicon chipsets, sensor integration and algorithms to interpret sensor data. As part of our effort to understand biological fundamentals, imec’s multi-electrode array (MEA) platform for heart-on-chip applications offers unparalleled capabilities to acquire high-density information (4444 electrodes/mm2) to enable extra- and intracellular recordings, electrical stimulation and impedance gauging to study patient-derived cardiomyocytes, cells that make up the heart muscle. imec is developing a rapid, low-cost SARS-COV2 test based on breath analysis (aerosol capture) aimed at a 5-minute analysis. Such tool is a key to economic recovery, and imec is planning large-scale testing of the prototype device at Brussels Airport later in 2021. imec has recently supported spinoffs and external companies that develop social distancing tools for usage during the pandemic. Healthcare is a key strategic area at imec, with multiple departments working on complementary topics, ranging from cell-sorting technologies and multi-electrode arrays, through sensors and systems for non-invasive cardiorespiratory and neurological monitoring, all the way to advanced processing of medical data and tooling for trials. SEMI: How is the pandemic impacting remote diagnostics? What’s new in that field? Agell: The pandemic has accelerated advances in remote diagnostics for healthcare – for example making remote doctor visits possible and launching telehealth into a successful sector. But in my opinion, this is just the starting point. Telehealth doctors will soon need to collect health data points such as body temperature, weight, or blood pressure remotely, the same information they collect during an office visit. Soon thereafter though, doctor’s will need more and more data, sparking the next stage of advances in remote diagnostics as algorithms are developed to analyze sizeable amounts of data. All in all, it will result in a big move from doctor-centric paradigms to more patient-centric solutions. Hopefully that jump will also drive a more proactive approach to health, enabling prevention and keeping people healthy, and leaving behind the era of curing the sick. imec research tools for respiratory monitoring will come in the form of a health patch. SEMI: Besides infectious disease diagnostics, what solutions will enable a paradigm shift? Can you name two global market trends related to the rising need for remote diagnostics? Agell: The paradigm shift in healthcare will be largely fueled by the hyperconnectivity trend. Communications are fast and far-reaching. The pandemic has proven that healthcare, similar to retail, banking, trading and business in general, can also be done partly remotely through a communications line. The need for proof of performance in the case of diagnostics has been proven challenging, due to the highly regulated medical field and the general conservativeness of this market. There is a clear trend underway in which algorithms and automated diagnostics are slowly gaining the trust of the medical community. Trials and regulatory submissions will help here, but the clear proof will be the general trust of the medical community (and general population) in solutions that have been on the market for a while. Similar to what happened with GPS navigation technologies back in the day, it would require a critical mass to reach general acceptance. As far as the healthcare market is concerned, there is a forecast bounce back from telehealth into hybrid models (a mix between in-office visits and telehealth) as a first post-pandemic scenario. Although this is perceived as the best of both worlds, its effectiveness and survival within the market is still to be proven. A clear market trend accelerated by the pandemic is the commoditization of health and wellness features in consumer electronics. A glimpse into consumer electronics venues reveals that watches, smartphones, weight scales and even your office chair or mattress will soon be collecting healthcare information. imec MultiElectrode Array (MEA) chipset SEMI: What is imec’s role in addressing the challenges and trends in healthcare? Agell: As an R D organization, imec offers expertise in the semiconductor, integration, data interpretation, data management and health-specific application domains. Thanks to our experience in horizontal technology and multiple application domain verticals (including healthcare), imec provides solutions to partners that push the boundaries of performance in health-tangential fields such as communications, consumer electronics, automotive and energy. imec is part of big European initiatives aiming to tackle the challenges of the pandemic. For example, we recently started working on the Digipredict project, which aims at early intervention in infectious diseases. We’re working with key players in the research domain within the EU such as École Polytechnique Fédérale de Lausanne, University of Twente and Eidgenössische Technische Hochschule Zürich. Additionally, imec has worked for market leaders in the healthcare sector such as Philips and Biotelemetry (recently integrated in Philips) and can help partners make the next health solution a reality. SEMI: How can technology unite us? What do you expect from your participation at SEMI Technology Unites Global Summit? Agell: I am a big optimistic on this pandemic. I believe technology has played a key role in putting boundaries around damage caused by the global health crisis. Technology does not only unite us, but it arguably saves lives! My personal expectation for the SEMI Technology Unites Global Summit is for us to get a better understanding about how the semiconductor industry reacts to a pandemic and upcoming post-pandemic scenario. I am curious to see if health-related trends emerge, and whether this is a transitory effect. During the last global pandemic, the semiconductor industry was not even existing, so there is no clear precedent for the current situation. Carlos Agell, program manager and principal member of Technical Staff at imec, where he oversees the development of projects and sets strategy directions for research topics. He has a background in wearable device development, having taken leadership roles in development of two FDA-approved medical devices in the field of wearable cardiology. He is member of the Dutch chapter of the standardization committee, which develops next-generation international standards for active medical devices. Carlos Agell holds two MSc degrees in Electronics Engineering and EECS from the Polytechnical University of Catalonia (Spain) and the University of California in Irvine (Irvine, CA, USA). Serena Brischetto is senior manager of Marketing and Communications at SEMI Europe.

SEMI spoke with Eyal Shekel, senior vice president of Service Strategy and Excellence at Tokyo Electron Limited, about the impact of artificial intelligence (AI) on smart manufacturing and how other fab solutions for smarter process tools are advancing semiconductor manufacturing.Eyal shared his views ahead of his presentation at the SEMI Fab Management Forum, 17 February, as part of the SEMI Technology Unites Global Summit, 15-19 February 2021, an online event. Join us to meet experts from Tokyo Electron and other key industry influencers. Registration is open. SEMI: AI technology is considered a key enabler for smart manufacturing. What are the latest trends? Shekel: The advent of advanced nodes and extreme complex 3D semiconductor geometry has lengthened time to market and increased costs in areas ranging from equipment development and large-scale metrology usage to monitoring yield inhibitors.AI is becoming a critical tool in the area of material informatics to determine suitable materials and processing techniques in order to meet the needs of future devices. Together with new materials and processes, the development and implementation of virtual metrology will enable accurate and almost absolute real-time monitoring of our customers’ device wafers at each stage of the manufacturing process.SEMI: What are the benefits of data analysis in the process from R D and Ramp-Up to High-Volume Manufacturing? Shekel: The new research field of materials informatics enabled by AI provides tools to guide the highly efficient discovery and optimization of production processes. For example, TEL has developed methodologies for co-optimizing processes and materials for etch rates.To monitor and manage the yield of semiconductor fabrication processes, direct metrology measurements are important. However, it is difficult to monitor all production wafers due to the time and cost involved. With deep learning AI, it is now becoming possible to predict every wafer’s metrology measurements based on production equipment data and previously processed wafer metrology variables. This enables total quality management and run-to-run control, while simultaneously reducing production costs and cycle time.SEMI: Can you tell us more about TEL Service Advantage?Shekel: TEL Service Advantage is a TEL global support organization that allows customers to select a service plan that fits their needs. Through TEL Service Advantage, we can quickly respond to customer requests and technical advancements. TEL Service Advantage provides various plans to maximize equipment maintenance efficiency for customers and productivity from equipment manufactured by TEL. TEL Service Advantage plans can be combined to meet customer needs and achieve maximum results.A key enabling element of TEL Service Advantage is TELeMetrics™. TEL analyzes equipment data from various sensors using a remote connection and, based on that analysis, provides solutions to customer-specific problems around equipment throughput and predictive maintenance.SEMI: How is AI helping during the pandemic? Can you share a success story? Shekel: The pandemic forced severe travel restrictions worldwide, making it very difficult or even impossible in many cases to visit our customers, as it is still the case today. Standard communication devices like smartphones and email helped at the beginning when TEL intensified the remote support by our Total Support Centre (TSC).TEL continued to develop its Service Advantage program quickly, and started using additional advanced tools and methodologies such as the following: Deployed AR (Augmented Reality) to remotely assist our customer and TEL engineers Secured remote connections into TEL tools to investigate parameters and logs, or to change set-up Used remote training courses that connects trainers via video conferencing systems and training tools in the factories to skill up engineers located in a different parts of the world Used AR glasses for tool start-up and troubleshooting Expanded TEL database global technology with multi-tool on languages search capabilities A key project at a customer site in Europe offers an excellent success story. Using all the approaches above, we collaborated with the local team to put a tool into production with no major delays. This was highly appreciated by the customer and very important for us.SEMI: What do you predict for the future? Shekel: Global technology infrastructure continues to develop and expand rapidly. Elements like 5G networks, IoT and advanced sensing capabilities will lead to what we call General AI, which will be based on neuro-like infrastructure. The auto learning will spread across domains and rely on internal logic and reasoning to automate many tasks that are manual today. In our industry in particular, General AI will enable workers to focus more on data analytics and future advanced R D rather than ongoing operations.SEMI: How can technology unite us? What do you expect from your participation at SEMI Technology Unites Global Summit?Shekel: Technology united us in the last 150 years. The connectivity started with telegraph and telephone and was used to exchange information over wider distances. Nowadays, video conference capabilities, AR and improving communications technology makes it much easier to unite people who are geographically dispersed. This becomes obvious and valuable especially during this pandemic period. As a fact, we are able to continue to perform all our key activities – our tool support, training and customer relationships – even if we cannot be present in person.The SEMI Technology Unites Global Summit is a great chance to stay connected to people and customers that I would normally meet at the SEMICON exhibitions.It also offers the opportunity to network with many more people who I would not be able to meet otherwise. Moreover, I can watch speeches and presentations at any time! Normally I would miss some programs since exhibitions and events took place at the same time.Eyal Shekel, senior vice president of Service Strategy and Excellence at Tokyo Electron Europe Limited, is a 27-year semiconductor industry veteran. Upon his graduation as a Mechanical Engineer from the Technion (Israel leading technical institute), he joined Applied Materials. In 1997 he moved on to Tokyo Electron (TEL) in Europe, served as the Regional Service Manager of Israel and, soon after, was appointed the company’s General Manager. Since 2005 Eyal has been part of TEL Europe senior management. He oversaw the Service and Support Operations for TEL Europe as a senior vice president until 2019. In his current role, he co-leads TEL’s Global Service Committee in Japan.The SEMI SMART Manufacturing Initiative is a global effort to promote awareness of and interest in smart manufacturing with a focus on delivering industry-recognized best-in-class programs and services to enable members to maximize product quality and productivity while reducing costs. Activities are focused on building out core capabilities to enable smart manufacturing across the microelectronics supply chain. MADEin4 is a consortium of 47 partners from 10 countries connecting the full range of supply chain – from semiconductor equipment manufacturers and system-integrating metrology companies to RTOS and key applications such as the automotive industry. The MADEin4 Project develops next generation metrology tools, machine learning methods and applications in support of Industry 4.0 high-volume manufacturing in the semiconductor manufacturing industry. Serena Brischetto is senior manager of Marketing and Communications at SEMI Europe.

SEMI spoke with Dr. Franz Laermer, Research Fellow (Senior Chief Expert) at Robert Bosch GmbH Stuttgart, Corporate Sector Research and Advance Engineering, about the latest trends in medical diagnostics and personalized treatments. An open platform for the automation of complex molecular diagnostics workflows recently developed by Robert Bosch has proven its ability to take molecular diagnostics to the point of need.To make this happen, miniaturization, microsystems and microfluidics technologies, as well as microelectronics, are crucial. This is critical for the detection of SARS-CoV-2 infections within a rather short development time.Laermer shared his views ahead of his presentation at the SEMI MedTech Forum, 19 February, as part of the SEMI Technology Unites Global Summit, 15-19 February 2021, online event. Join us to meet experts from Robert Bosch and other key industry influencers. Registration is open. SEMI: What is driving innovation in diagnostics and what role does the semiconductor industry play?Laermer: One of the major drivers in diagnostics is the molecular breakdown and detailed analysis of nucleic acids on the level of the individual nucleotide. This reveals the root causes of diseases like cancer, genetic aberrations, infections and therapy resistances. Today’s solutions are mostly PCR-based (that rely on the polymerase chain reaction) or depend on sequencing. The keys to bring these technologies closer to the point of need are automation, miniaturization, low-cost, ease of use, flexibility, reliability, and fast time from sample-to-result. Semiconductor and microsystems technologies are enablers to meet these requirements, thanks to their ever-increasing performance, with Moore’s law pushing the semiconductor side of the story.SEMI: Can you tell us more about the the Bosch VIVALYTIC system? Laermer: VIVALYTIC is a universal and highly flexible diagnostic platform for the integration and automation of a wide variety of molecular diagnostics assays. It consists of the universal laboratory analyzer tool, which operates the application-specific cartridges. All reagents and specific bio contents are contained in the application-specific cartridges in a long-term stable manner at room temperature. The user only has to introduce the patient sample into the cartridge, push the cartridge into the analyzer and start the automatic workflow, which yields a diagnostic result within typically less than one hour. The VIVALYTIC products are manufactured by Bosch Healthcare Solutions GmbH (BHCS) in cooperation with strategic diagnostic partners and bio content owners.SEMI: How is the pandemic impacting automated diagnostics in the medical industry? What is new now?Laermer: The pandemic has clearly shown the importance of fast automated diagnostics at the point of need. Breaking infection chains as early as possible requires fast reliable PCR testing anywhere and anytime. We managed to reduce the time needed for SARS-CoV-2 rapid testing to less than 30 minutes for positive probes, an achievement that is embraced by our customers. Until a sufficiently high level of immunization is reached by vaccination, rapid testing is the only way to limit the number of infections, hospitalizations, and lethal outcomes of the COVID-19 pandemic.SEMI: Besides infectious disease diagnostics, what solutions will enable a paradigm shift in medical treatments?Laermer: Today more and more targeted drugs and therapies are developed in oncology to address certain mutations that are considered drivers of the cancer. This moves away from the one drug fits all approach to precision oncology. As a prerequisite of this personalized therapy, the mutation status of a tumor must be clarified – and monitored precisely and repetitively during therapy. The latter requires molecular diagnostics at the point of need, i.e. at the onco-ambulance. One keyword in this context is liquid biopsy. Another example of personalized therapy is the detection of bacteria type and antibiotics resistances in bacterial infections, and the selection of optimized antibiotics therapy.SEMI: What solutions can Robert Bosch bring to address the needs just mentioned? Laermer: Robert Bosch GmbH is a leader in microsystems, microsensors and semiconductor technologies. Our new 12-inch semiconductor plant in Dresden will strengthen our position in these fields. This encompasses artificial intelligence and the Internet of Things as well. As a technology provider, we generate superior solutions for automation and management of complex workflows, and thus deliver win-win-solutions together with our diagnostic partners.SEMI: How can technology unite us? Laermer: Technology, especially semiconductor and microsystems technology, is a game changer in the medical area. Whenever different disciplines meet each other and cooperate, as are the medical, diagnostics and semiconductor areas, innovation is accelerated strongly. New things happen at the interfaces between different areas of competencies.Franz Laermer, Research Fellow (Senior Chief Expert), Robert Bosch GmbH Stuttgart, Corporate Sector Research Advance Engineering. Dr. Franz Laermer joined the Corporate Research and Technology Center of Robert Bosch GmbH, Stuttgart, Germany, in 1990, where he started the development of new key technologies and sensor functions for the upcoming field of MEMS at Bosch. Today he is a Bosch Research Fellow/Senior Chief Expert for Microsystems, Microfluidics and Molecular Diagnostics. Laermer's work laid the foundation for the VIVALYTIC Diagnostics Platform of the newly founded Bosch Healthcare Solutions (BHCS) Business Division and the SARS-CoV-2 rapid tests from Bosch. Dr. Franz Laermer is the co-inventor of the Bosch Deep Reactive Ion Etching Process (BOSCH-DRIE) for microstructuring silicon. He holds more than 200 patents and was awarded with European Inventor of the Year 2007 – Category Industry prize by the European Commission and the European Patent Office (together with co-inventor Andrea Urban) for the invention, development and sustainable success of the BOSCH-DRIE process. He received the 2014 IEEE Jun-ichi Nishizawa Medal Award from the Institute of Electrical and Electronics Engineers (IEEE), USA. In 2019 he was awarded with the 2019 Technology Prize from the Eduard-Rhein-Foundation in Germany.Serena Brischetto is senior manager of Marketing and Communications at SEMI Europe.

Electric mobility, renewable energy and other technology innovations like IoT, 5G, smart manufacturing and robotics all require reliability, efficiency, and compact power systems, fueling the adoption of Silicon Carbide (SiC) and Gallium Nitride (GaN) to support lower voltages in significantly smaller devices. But chip designers must overcome the technological and economical challenges of integrating the two semiconductor materials into power systems.SEMI spoke with Elisabeth Brandl, Business Development Manager at EV Group about trends and new developments within the power electronics industry and the devices' application in smart mobility. Brandl shared her views ahead of her presentation at the SEMI SMART Mobility Forum, 18 February, as part of the SEMI Technology Unites Global Summit, 15-19 February 2021, online event. Join us to meet experts from EV Group and other key industry influencers. Registration is open. SEMI: What is driving new developments in power electronics?Brandl: Globally there are significant changes in infrastructure requirements for communication, automotive and power conversion. We need to look no further than the rising adoption of 5G, electric and hybrid vehicles, and renewable energy as examples of drivers of these changes. The device level, particularly in the field of power electronics, figures prominently in these shifts.The power electronics industry faces a growing number of scenarios where conventional silicon power devices are no longer suitable and are easily outperformed by new architectures mainly based on wide bandgap semiconductor materials like Silicon Carbide (SiC) and Gallium Nitride (GaN).SEMI: What industry challenges is power electronics innovation aiming to solve? Brandl: Power conversion efficiency is very important and needs further improvement as the related losses significantly contribute to the overall power consumption. For green power and a better environmental footprint, renewable energy is crucial, but so is overall power-consumption efficiency, yet the role of power devices is often underestimated. High-frequency and high-power applications, such as data center applications and inverters for renewable energy, where silicon power electronics are reaching their limits, are also important areas in power electronics.SEMI: How will the transition from silicon to compound semiconductor materials help?Brandl: The superior material properties of several compound semiconductors can tackle the need for lower losses in power conversion or better high-frequency behavior. Today, we mainly talk about GaN and SiC power devices as they are materials well-suited to address these needs. However, other materials like diamond and gallium oxide are in development for these applications. Material properties of SiC that enable thinner materials with lower power losses and better thermal behavior address power conversion efficiency as well as form factor challenges. GaN, especially in a high electron mobility transistor (HEMT), can be used for high-frequency applications.SEMI: What enables a better and more cost-effective manufacturability of SiC and GaN power devices?Brandl: For the end customer, a typical figure of merit regarding the cost effectiveness is $ per Ampere or Watt. While this seems simple, the reality is of course more complex. It is important to understand the main cost contributors within the manufacturing area. For SiC, this is clearly the substrate cost. In my presentation, I will show a way to reduce this cost via wafer bonding. For GaN, epitaxy – a method for growing or depositing mono crystalline films on a substrate – is the critical parameter. And of course, yield has a very big impact on cost effectiveness too, which means that good process control including metrology is very important.SEMI: Many semiconductor companies are already transitioning to silicon carbide and gallium nitride. Can you give us an example of a success story?Brandl: All the big power device manufacturers have either acquired or developed their SiC and/or GaN power device technology, so they also see a bright future for these wide bandgap semiconductors in the power device market. The most prominent success story is STMicroelectronics with its SiC MOSFET power devices, which have been implemented by Tesla in its Model 3 vehicles since 2018.SEMI: What is coming next?Brandl: New materials for power devices are being explored, such as diamond and gallium oxide. For SiC, the trend is moving toward 8-inch substrates, which is the focus of the funded EU project REACTION under the coordination of STMicroelectronics. Cost reduction and substrate availability also play a big role. All major power device manufacturers have contracts to secure the supply chain for SiC substrates because material availability is the main uncertainty at this time. Finally, collaborations along the supply chain are crucial and generally beneficial for all parties, as development requirements are better communicated and prioritized.Elisabeth Brandl is Business Development Manager at EV Group. She received her master in technical physics from the Johannes Kepler University Linz, Austria in Semiconductor and Solid State Physics. Since 2014, she has been responsible for Product Marketing Management for temporary bonding and compound semiconductors at EVG. The SMART Mobility Forum is the digital platform of SEMI Europe’s Global Automotive Advisory Council (GAAC) for industry stakeholders along the automotive and electronics value chains, from Design, Semiconductor Equipment and Materials Suppliers to Automotive OEMs.Smart Mobility is one of four SEMI initiatives focused on building communities, content, and activities around critical and emerging electronics markets. Read more about our Regional Chapters.Serena Brischetto is senior manager of Marketing and Communications at SEMI Europe.

SEMI spoke with Tom Doyle, founder and CEO of Aspinity, about the challenges of packing more localized intelligence into portable Internet of Things (IoT) devices without draining their batteries. Doyle shared his views on Aspinity’s system-level approach – solve the power problems by performing machine learning in analog – ahead of his presentation at the SEMI MEMS Imaging Sensors Technology Showcase, 18 February, as part of the SEMI Technology Unites Global Summit, 15-19 February 2021, online event. Join us to meet experts from Aspinity and other key industry influencers. Registration is open. SEMI: Why is power efficiency so important for IoT devices? Doyle: Hundreds of millions of IoT devices are improving our lives at home and at work. Always on and always sensing the environment for data, these smart devices have traditionally been wall-powered and have relied on the cloud for their data processing needs, but clogged networks, as well as privacy and performance issues, have necessitated the migration to edge processing.Spanning consumer, medical and industrial, these IoT devices are becoming smaller and more portable. And a portion of them is operating remotely in hard-to-access locations. So now we are packing more functionality into the device and we are moving to battery power and the batteries need to last a long time. That is a big challenge before us, and to answer it, we need to find the most power-efficient ways to integrate always-on sensing capability into IoT devices because we cannot afford to have short battery life limit market adoption.SEMI: Why is it so challenging to deliver low-power, always-on solutions and how can sensors suppliers achieve improvements in system power? Doyle: In today’s always-on IoT devices, all sensor data – which are naturally analog – is immediately digitized at high resolution, and then it’s analyzed to determine whether a wake word has been spoken, a specific motion has been made, or some other anomaly has occurred. But since most of the data collected will not contain the information for which the device is waiting, this digitize-first approach wastes significant battery life by continuously running irrelevant data through the ADC and the digital processor.Sensors suppliers have some options to consider for reducing power. If they are satisfied achieving incremental improvements in battery life, both sensors and digital processor suppliers can continue to drive down the power of each individual component in the system. But to achieve revolutionary power savings, we must look at a more holistic system solution.The fundamental problem is that moving data through a system costs power. That is why the most efficient way to save power is to reduce the amount of data down to what’s actually important as early as possible, right at the start of the signal chain, where the physical world becomes data. If we can minimize the amount of data that require downstream processing, then we can maximize battery life.SEMI: Aspinity aims to solve the battery-life problem in IoT devices by introducing a new system architecture. Could you explain how your approach differs from digitize-first?Doyle: Aspinity’s solution, called the Reconfigurable Analog Modular Processor (RAMP), is an analog processing technology that combines analog machine learning (analogML™) and analog compression to enable accurate, ultra-low-power analog event detection and system wake-up. RAMP technology enables a new system architecture, which we call analyze-first, that allows an always-on system to spend just a little bit of analog power up front at the sensor to determine whether sensed data are relevant to the task at hand before waking the digital system for further processing. The analyze-first architecture can extend battery life by months or years over digitize-first architectures because it keeps the higher-power digital components asleep unless important data require digitization and analysis, which in some applications – such as voice-first or acoustic event detection – may occur very rarely. Aspinity RAMP voice activity detection with preroll from Aspinity on Vimeo. SEMI: Can you give us an example?Doyle: Here is a practical example of how this works: For most voice-enabled systems, such as smart speakers, voice-activated TV remotes and hearables, voice is only present 10%-20% of the time – but the digitize-first architecture on which these devices are traditionally based is digitizing 100% of the sound data captured by the microphone, even when most of that data are irrelevant and could not possibly contain a wake word.In contrast, the RAMP-based analyze-first architecture is highly efficient since it uses feature extraction and a neural network to analyze the sound at the microphone, right where it enters the device, to determine if the sound contains voice before waking the digital wake word engine. Additionally, the accuracy of most wake word engines relies not just on waking up and analyzing the wake word, but also on analyzing the 500ms of sound prior to the wake word (preroll). To support wake word engine performance, the RAMP also continuously compresses 500ms of preroll that can be stored in just 2k of memory and delivered to the wake word engine along with the voice data. So, this new analyze-first approach using RAMP technology can extend battery life by 10 times over older digitize-first designs, without sacrificing performance and accuracy.SEMI: What solutions can Aspinity bring to address the current market needs? Doyle: Aspinity offers the only analogML chip for always-on IoT devices that run on battery: the RAMP chip.The RAMP is trainable and programmable to detect many different types of sensor events directly from the raw analog sensor data. One application that benefits from a RAMP chip are devices that are always-listening for voice, for glass break or alarms, or for some other type of sound. Other examples include vibration sensors that monitor industrial equipment for predictive and preventative maintenance, and heartrate sensors that are used to detect anomalies in wearables and other biomedical applications.Aspinity just recently introduced our voice-first evaluation kit – which we will be demonstrating during the Technology Showcase at Technology Unites – to enable our customers to get first-hand experience with our RAMP-based analog voice wake-up solution. With this complete hardware and software kit, customers can experience all of the benefits of analogML and analog data compression – 10x power savings without a reduction in wake word detection accuracy –for their next generation of voice-enabled devices.SEMI: How can technology unite us? What do you expect from your participation at SEMI Technology Unites Global Summit?Doyle: I think this past year has shown us that when time gets tough – and for many of us, the COVID-19 pandemic has been one of the most difficult challenges we have faced – that innovation is critical to solving major problems. The microelectronics industry has played an important role in providing critical components for COVID-19 testing, ventilators, air-purification systems, and other equipment used in healthcare settings. COVID-19 has also accelerated the move to voice as a preferred interface to many devices in an effort to stem the spread of germs on surfaces.The biotech industry is gearing up to provide the vaccines that we hope will restore more normalcy to our daily lives. We can thank the successful collaborations between R D innovators and established companies in many different markets for the new devices and drugs now going into production.With traditional in-person conferences still on hold until the pandemic eases up, attending industry conferences with exceptional speakers presenting interesting content is more important than ever. SEMI Technology Unites Global Summit provides that opportunity, and I’m genuinely looking forward to participating.Tom Doyle, Founder and CEO of Aspinity, brings over 30 years of experience in operational excellence and executive leadership in analog and mixed-signal semiconductor technology to Aspinity. Prior to Aspinity, Tom was group director of Cadence Design Systems’ analog and mixed-signal IC business unit, where he managed the deployment of the company’s technology to the world’s foremost semiconductor companies. Previously, Tom was founder and president of the analog/mixed-signal software firm, Paragon IC solutions, where he was responsible for all operational facets of the company including sales and marketing, global partners/distributors, and engineering teams in the US and Asia. Tom holds a B.S. in Electrical Engineering from West Virginia University and an MBA from California State University, Long Beach.Serena Brischetto is senior manager of Marketing and Communications at SEMI Europe.