BIOGRAPHY
Fabrice Nemouchi received a PhD degree in Materials Science from Paul Cézanne University
(Marseille), France, in 2005. He deals with the growth and kinetics mechanism of mainly Ni-silicides
and Ni-germanides. Then, he joined the CEA, LETI in 2006 as a fellow research engineer to develop
contacts on both Si and Ge (silicidation and germanidation) for FDSOI technology in 200 mm in the
frame bilateral project with STMicroelectronics.
In 2008, he was hired by the CEA, LETI to work on Cu metal CMP processes and low k damage
limitation for C45 and C28 nodes. From 2011 to 2017, he led the LETI Contact Team in order to
develop semi-conductor metallization on several technologies: Nanoelectronics (FDSOI 28, FDSOI
22) with STMicroelectronics and GlobalFoundries, photonics (III-V metallization with CMOS
compatible process and material), and superconducting contacts for Qbit applications. After one year
spent as a CEA-LETI assignee in GlobalFoundries Dresden working on 12FDSOI technology
development (integration of MOL/BEOL), he took charge of the MOL and BEOL integration
activity at CEA-LETI for various applications. In 2020, he was in charge of the laboratory of
process integration and pre-industrialization supporting internal projects, start-ups, and industrial
company development. Finally, he became in 2023 Manager of clean-room methods and logistics,
process integration, and pre-industrialization section.
Since 2011, he has been supervising 6 PhD students, 4 Post-doctorates, and over 10 master students. He
wrote over 130 papers and communications, holds 30 patents, and is still active in advanced
contact and BEOL for FDSOI and superconducting Qbits.