BIOGRAPHY
Corporate VP of DPG Dry Engineering, DPG Chief Engineer, Lam Fellow, and Lam Patent Innovation Awardee
- Often called “one of the key innovation engines for DPG”
- Over his thirty year industry career—twenty six of those at Lam companies—this Lam
Fellow has led or contributed to numerous wafer fabrication product developments in
ion implant, physical vapor deposition, plasma enhanced chemical vapor deposition,
and atomic layer deposition technologies. - Cofounder of Angstron Systems, Inc., a venture-backed startup and pioneer in metal
atomic layer deposition wafer processing technology acquired by Novellus Systems,
Inc. in 2004 - M.S. and B.S. in Mechanical Engineering from MIT and Systems Engineering
certification from SJSU - >100 patents in wafer fabrication equipment hardware and process technologies