semiconductor manufacturing equipment

More than 4,000 participants convened in person at the four-day SEMICON Europa Expo in Munich, November 16-19. Attendees gathered at the Executive Forum for insights into the latest trends in the semiconductor industry and heartily welcomed the long-awaited return to in-person networking.

As the Biden administration begins to advance its policy goals through U.S. government agencies, SEMI is eager to work with these new officials and appointees to advance innovation and strengthen U.S. leadership in the microelectronics industry. SEMI President and CEO Ajit Manocha today sent a letter to Commerce Secretary-Designate Gina Raimondo advocating for strengthening American manufacturing, investing in research and development and pursuing multilateral rather than unilateral U.S. export controls. SEMI also “requests Commerce perform a comprehensive review of recent policies and formally seek industry input via publication of a Notice of Inquiry (NOI), giving industry its first formal opportunity to provide its views on these significant regulations.” The letter discusses the importance of how export controls are implemented, advocating that “multilateral controls – where items of concern are controlled by all major producing nations – create a level playing field, maximize effectiveness, and minimize harm to U.S. national security and economic competitiveness. Unilateral U.S. controls over items for which there are comparable non-U.S.-origin items are generally ineffective in supporting national security goals and are likely to erode any technological advantages enjoyed by U.S.-origin items.” Foreign availability of semiconductor manufacturing equipment, materials and design software is an important consideration for U.S. export control policy related to those items. In an appendix to the letter, SEMI provided charts detailing the foreign availability of major types of semiconductor manufacturing equipment and materials. For nearly all items, there are competitive alternatives to U.S.-origin items available from non-U.S. sources. With many semiconductor technologies concentrated in a handful of key exporting nations, the letter encourages a unified approach via a plurilateral export control regime instead of unilateral U.S. controls for these technologies. SEMI provided a framework of issues that need to be considered and properly addressed in negotiating a plurilateral agreement related to semiconductor industry export controls. The previous administration created several unilateral controls that were implemented with little or no opportunity for public or industry comment and which created several unintended consequences. In addition to the request to publish an NOI, the letter asks Commerce to correct unintended controls related to the August 2020 expansion of EAR General Prohibition Three and reduce the backlog of license and classification requests. SEMI is pleased to work with the U.S. Department of Commerce and other policymakers by providing industry data, trends and perspectives to ensure export controls effectively serve national security interests without undue harm to technological development and leadership in this dynamic, globally competitive industry. Kimberly Ekmark is director of Public Policy and Advocacy at SEMI.

Semiconductors play an essential role in modern society by enabling ground-breaking technological advances. The manufacture of high-volume and advanced semiconductors requires the use of fluorinated chemicals known as PFAS. Representing the voice of SEMI members, I explained the important role of these substances and their “essential use” in the semiconductor manufacturing supply chain at a Chemical Watch conference for industry and European Union decision-makers on 3rd of December 2020.In order to achieve the European Green Deal’s zero pollution ambition for a toxic-free environment, the European Commission announced in its recently published Chemicals Strategy for Sustainability its intention to restrict the use of the most harmful chemicals, except in cases where they are deemed essential for society. Per- and polyfluoroalkyl substances – known as PFAS – are the first group of chemicals facing regulatory scrutiny on this basis. This begs the question: What chemicals should be characterized as essential for society and what uses will they encompass? The key and enabling role of semiconductors in modern lifeSemiconductors are essential and ubiquitous in our lives. They are integral to enabling modern society to function – driving advancements in mobile communication technologies for the smartphones and computers that help us work more efficiently and connect us with our loved ones. These benefits have never been more evident than in 2020 with billions of people finding themselves working and studying remotely and safely from home.At the same time, technologies relying on semiconductors have been vital in the effort to combat COVID-19 – in ventilators, medical imaging devices and digital healthcare solutions. In addition, semiconductors will also enable the next leap in society to Industry 4.0 and as essential building blocks in connected and electric vehicles, artificial intelligence (AI) and quantum computing.The Commissioner for Internal Market, Thierry Breton, has highlighted the strategic importance of semiconductors in achieving European digital sovereignty (for instance, in his speech at Hannover Messe Digital Days), and the EU’s New Industrial Strategy[1] also points to the importance of semiconductors and microelectronic systems. What must also be appreciated are the cost and complexity of producing these valuable technologies. Setting up a cutting-edge fabrication plant with the hundreds of pieces of semiconductor manufacturing equipment typically required can cost around €15 billion.[2] A single semiconductor manufacturing tool typically consists of millions of articles, and a typical fab may house several hundred pieces of equipment. Furthermore, according to SEMI estimates, the fabrication of semiconductor wafers requires approximately 500 highly specialized process chemicals. In many cases, these processes, equipment and facilities rely on the unique properties offered by PFAS.“SEMI has worked diligently to highlight the strategic importance of semiconductors in achieving European digital sovereignty, and we are pleased that the critical role of microelectronics has been fully recognized by the EU and Member States. Fluorinated chemicals are essential for semiconductor manufacturing. "These specific chemicals are necessary due to their unique properties, and no alternatives are currently available that can adequately provide the functional properties required in semiconductor manufacturing. The essential use concept, therefore, must enable technological innovation, must apply across the entire supply chain, and must enable EU’s critical infrastructure and strategic objectives.” What are PFAS, and why and where are they used in semiconductor manufacturing?PFAS are a broad and highly diverse group of substances with unique properties and characteristics. The Organisation for Economic Co-operation and Development (OECD) has compiled a list of approximately 4,700 substances,[3] a handful of which are used in the semiconductor manufacturing industry. These very specific chemicals are necessary due to their unique and unparalleled properties that enable them to be used in the demanding conditions of semiconductor manufacturing.Semiconductor chemicalsAt the very core of semiconductor manufacturing is the photolithography process, where microscopic geometric patterns are transferred onto a film or substrate. Photolithography specialty formulations containing fluorinated compounds are used in various steps of this process to ensure quality and reduce the probability of defects. PFAS must be used due to their low surface tension and compatibility with other chemicals. PFAS are typically no longer present in the finished product. However, there are applications where PFAS are present in the final semiconductor device, particularly in imaging semiconductors used in cameras, displays and some medical devices, amongst others. Semiconductor manufacturing equipmentPFAS are also essential to semiconductor manufacturing equipment and factory infrastructure. The exceptional combination of their heat and chemical resistance and their chemical inertness allows fluoropolymers to be used both in equipment components (tubing, gaskets, containers, filters, etc.) and lubrication (such as various oils and greases). These same properties are also needed to ensure the functioning of the surrounding infrastructure. Finally, some fluorinated gases, which are already regulated by specific legislation,[4] are used as refrigerants and to clean the facilities.These are a handful of examples of how PFAS are used in semiconductor manufacturing. Today, there is no other way to undertake these processes or to build semiconductor manufacturing equipment without PFAS. No alternatives are currently available that can adequately provide the functional properties required. Even if alternative chemicals and technologies were discovered today, due to the extremely complex qualification process throughout the value chain, it would take another 15 years to deploy them in high-volume manufacturing. Therefore, continued access to PFAS is a prerequisite for high-volume and advanced semiconductors. Lack of continued access to PFAS could lead to an inability to produce and supply the EU with semiconductor manufacturing technology.How should we think about essential uses?Regulators have started to think about what uses of PFAS are essential and in which cases their use should be allowed. In developing this concept, there are a few aspects to keep in mind.Essential use must enable, not hinder, technological innovationFirst and foremost, the essential uses concept should enable continued technological innovation instead of acting as a hindrance. Semiconductors and manufacturing technology are constantly evolving and becoming more diverse to help meet increasing societal demands. What we see as innovative today may be commonplace in the future, while future innovations may be unimaginable today. We must therefore be careful not to accidentally limit our future potential for innovation.Essential use must apply across the entire supply chainSecondly, classifying a use as essential should apply throughout the entire supply chain. We must, for example, avoid defining semiconductors as essential while classifying the semiconductor manufacturing equipment and chemicals used to produce semiconductors as not essential. In the semiconductor manufacturing supply chain, where one manufacturer can have up to 16,000 suppliers, this risk is evident.[5]Essential use must enable critical infrastructures and the EU’s strategic objectivesFinally, we should keep Europe’s societal priorities in mind. The EU needs to be able to maintain and protect its critical infrastructures. Similarly, we should not lose sight of the EU’s strategic objectives of a green and digital Europe.Semiconductors, in conjunction with their corresponding manufacturing equipment and chemicals, are essential technologies in everyday life and the backbone of the EU’s strategic value chains. Manufacturing semiconductors is a very expensive and complex process that would not be possible without the unique properties of PFAS, making them essential to achieving the EU’s strategic objectives today – whether the European Green Deal or digital autonomy – and in the future. Therefore, we must ensure that essential uses will enable the continued use of PFAS in semiconductor manufacturing.The SEMI presentation delivered at the Chemical Watch event can be accessed here.Emir Demircan is director of Public Policy and Advocacy at SEMI Europe.[1] “The EU will also support the development of key enabling technologies that are strategically important for Europe’s industrial future. These include robotics, microelectronics, high-performance computing and data cloud infrastructure, blockchain, quantum technologies, photonics [etc.]”[2] Emerging technologies in electronic components and systems (ECS) Opportunities Ahead – A study by DECISION, 2018 for the European Commission[3] Available here[4] Regulation (EU) No 517/2014, “F-Gas Regulation”[5] SIA Nathan Associates, 2016, https://www.semiconductors.org/wp-content/uploads/2018/06/SIA-Beyond-Borders-Report-FINAL-June-7.pdf

For the past several months, U.S. Department of Commerce officials have been developing proposals to amend the foreign direct product rule to require a license for the use of U.S.-origin semiconductor manufacturing equipment or technology in producing semiconductor devices for Huawei and its affiliates. Commerce has also advanced proposals to amend the de minimis rule to expand license requirements for shipments to Huawei and its affiliates of semiconductors produced outside the U.S. and incorporating minimal amounts of non-sensitive U.S. content.The expansion of both rules is among the many Huawei-related actions the administration is pursuing that include a government procurement ban, replacing Huawei equipment in rural U.S. networks, and prohibiting imports of technology and services from unspecified foreign adversary nations. The de minimis proposal was under final interagency review, and the direct product rule next in line for further action, when on February 18 President Trump issued a tweet saying that “The United States cannot, will not, become such a difficult place to deal with in terms of foreign countries buying our product, including for the always used National Security excuse, that our companies will be forced to leave in order to remain competitive.”Speaking to reporters later that day, the president, referring to chipmakers and Huawei, said “I think people were getting carried away with it… Things are put on my desk that have nothing to do with national security.”This week, SEMI President and CEO Ajit Manocha sent President Trump a thank-you letter for his comments and warned that the proposals could severely impact the U.S. and global semiconductor and electronics industries, create confusion and uncertainty in manufacturing supply chains, reduce investment in new capacity, and lead to the design-out of U.S. technology and U.S. components. SEMI also stressed that unilateral controls on U.S.-origin semiconductor devices, equipment, materials and technology could significantly and disproportionately harm U.S. companies, serve as a disincentive for further investments and innovation in the U.S., and impact non-U.S. companies as well. SEMI continues to work with policymakers to build awareness of the damaging and far-reaching effects of these proposals. The 2020 sales forecast for the global semiconductor manufacturing equipment market, excluding the U.S. (since the proposals only directly affect non-U.S. fabs), is approximately $53 billion. With U.S. producers accounting for roughly 40 percent market share, over $21 billion in U.S. equipment sales to non-U.S. fabs could be affected. Non-U.S. companies whose equipment incorporates U.S.-origin components and technology could also be impacted, and every fab worldwide using U.S.-origin manufacturing equipment or technology to produce items destined for Huawei would need to stop their use immediately and file for a license and/or remove U.S.-origin equipment and technology from production lines used for Huawei and its affiliates. The president’s remarks, along with the resignation of two key officials supporting the proposals, have created uncertainty around the next steps. SEMI is holding regular conference calls to keep members up to date and developing strong messages for members to use in their communications with government officials. SEMI Advocacy in Washington remains actively engaged with executive and congressional officials to ensure that U.S. export controls are narrowly tailored to specific national security concerns and applied at the multilateral level with major trading partners.Joe Pasetti is Vice President of Global Public Policy and Advocacy at SEMI.

Even for someone who has been in this industry since the days of the TI Datamath 4-function calculator and the TMS1100 4-bit microcontroller (yes, that’s been a LONG time – the movie Grease premiered the same year!), it is sometimes hard to grasp the scope and complexity of what happens in today’s leading-edge semiconductor gigafabs. In fact, the only way to comprehend the enormous volume of transactions that occur is to consider what happens in a single minute – this is illustrated in the infographic we have labeled “The Gigafab Minute.”* It’s amazing enough to think that a single factory can start 100,000 wafers every month on their cyclical journey through 1500 process steps… and have 99%+ of them emerge 4 months later to be delivered to packaging houses and then on to waiting customers. It’s quite another to realize that all of this happens continuously (24 x 7) and automatically. “How is this possible?” you ask.Well, a big part of the solution is the body of SEMI standards which have evolved since the early 80s to keep pace with the ever-changing demands of the industry. From an automation standpoint, many of these standards deal with the communications between manufacturing equipment and the factory information and control systems that are essential for managing these complex, hyper-competitive global enterprises.A significant characteristic of these standards is that they have been carefully designed to be “additive.” This means that new generations of SEMI’s communications standards do not supplant or obsolete the previous generations, but rather provide new capabilities in an incremental fashion. To appreciate the importance of this in actual practice, consider how the GEM, GEM300, and EDA/Interface A standards support the transactions that occur in a single Gigafab Minute.Starting at 1:00 o’clock on the infographic and moving clockwise, you first notice that 2.31 wafers enter the line. Of course, these are actually released in 25-wafer 300mm FOUPs (Front-Opening Unified Pod), but 100K wafers per month translates to 2.31 per minute. Since these factories run continuously, once the line is full, it stays full. And with an average total cycle time of 4 months, this means that there are 400K wafers of WIP (work in process) in he factory at any given time. This number, and the total number of equipment (5000+), drive the rest of the calculations.GEM (Generic Equipment Model) – SEMI E30, etc.The GEM messaging standards were initially defined in the early 90s to support the factory scheduling and dispatching applications that decide what lots should go to what equipment, the automated material handling systems that deliver and pick-up material to/from the equipment accordingly, the recipe management systems that ensure each process step is executed properly, and the MES (Manufacturing Execution System) transactions that maintain the fidelity of the factory system’s “digital twin.”Every minute of every day, GEM messages support and chronicle the following activities: 240 process steps are completed (i.e., 240 25-wafer lots are processed), 300 recipes are downloaded along with a set of run-specific adjustable control parameters, and 600 FOUPs are moved from one place to another (equipment, stockers, under-track storage, etc.). For each of these activities, the factory’s MES is notified instantaneously.GEM300 – SEMI E40, E87, E90, E94, E157With the advent of 300mm manufacturing in the mid-to-late 90s, a global team of volunteer system engineers from the leading chip makers defined the GEM300 standards to support fully automated manufacturing operations. Starting at 5:00 o’clock on the infographic, the number of transactions per minute jumps almost 3 orders of magnitude, from the monitoring of 900 control jobs across 4000 process tools to the tracking of 360,000 individual recipe step change events. This level of event granularity is essential for the latest generation of FDC (Fault Detection and Classification) applications, because precise data framing is a key prerequisite for minimizing the false alarm rate while still preventing serious process excursions. In this context, more than 6000 recipe-, product- and chamber-specific fault models may be evaluated every minute.Simultaneously, the applications that monitor instantaneous throughput to prevent “productivity excursions” and identify systemic “wait time waste” situations depend on detailed intra-tool wafer movement events. In a fab with hundreds of multi-chamber, single-wafer processes, 75,000 or more of these events occur every minute. EDA (Equipment Data Acquisition) – SEMI E120, E125, E132, E134, E164, etc.Rounding out the SEMI standards in our example gigafab is the suite of EDA standards which complement the command and control functions of GEM/GEM300 with flexible, high-performance, model-based data collection. The EDA standards enable the on-demand collection of the volume and variety of “big data” required from the equipment to support the advanced analysis, machine learning, and other AI (Artificial Intelligence) applications that are becoming increasingly prevalent in leading semiconductor manufacturers. As EUV (Extreme Ultraviolet) lithography moves from pilot production to high-volume manufacturing at the 7nm process node and beyond, the litho process area will become a major source of process data by itself, generating 10 GB of data every minute. This is in addition to the 100 GB of data collected from other process areas. The End ResultThe final wedge (12:00 o’clock) in our infographic highlights the real objective – which is producing the millions of integrated circuits that fuel our global economy and provide the technologies that are an integral part of our modern way of life. Assuming a nominal die size of 50 square mm (typical of an 8 GB DRAM), the 2.31 wafers we started at 1:00 o’clock result in almost 3200 individual chips. But none of this would be possible without the pervasive factory automation technology we now take for granted. So, as you finish reading this posting on whatever device you happen to be using, take a micro-moment to acknowledge and thank the hundreds of standards volunteers whose insights and efforts made this a reality!You may not be responsible for running a gigafab anytime soon, but the SEMI standards used in this setting are no less applicable to any Smart Manufacturing environment. Give us a call if you’d like to know more about how these technologies can benefit your operations for many years to come.Alan Weber is Vice President, New Product Innovations, at Cimetrix Incorporated. Previously he served on the Board of Directors for eight years before joining the company as a full-time employee in 2011. Alan has been a part of the semiconductor and manufacturing automation industries for over 40 years. He holds bachelor’s and master’s degrees in Electrical Engineering from Rice University. For more information on SEMI Standards, please click here.