Vice President Tokyo Electron Limited
Takahito Matsuzawa is the technology leader for developing AI algorithms and related Applications at Tokyo Electron. He joined Tokyo Electron (TEL) in 1995 and started his carrier as a software engineer.
During his engineering experience, he came across machine learning technology in 2010, and started to investigate how it can be adopted to data analytics problems, which included multivariate and were difficult to express by physics only. He found out it can interpolate missing data, effectively remove outliers, or it can also cover the residual from physical model. He started to run an AI dedicated engineering group in 2012 to prove these findings by solving actual problems. As Semiconductor manufacturing process are getting more complex, the necessity of AI is getting bigger, and research and development in this area is growing as TEL's AI Centre. Now he and his group are leading corporate AI technology and its roadmap, as one of the key technologies for Smart Manufacturing in Semiconductor Fab.
Presentation Title: AI Adoption for Semiconductor Manufacturing World
AI is now one of the most important key elements to make everybody’s life better. The Semiconductor manufacturing world is no exception. With its process windows getting narrower, and the requirement for Tool capability getting more severe. On its manufacturing, if you try possible parameter combinations one by one, it can easily take thousands of years. The presentation shows how TEL is adopting AI technologies into Semiconductor manufacturing to make this complicated world easier. We believe that better AI enables better Semiconductor, as well as better Semiconductor enables better AI.