SEMICON Southeast Asia 2018: Dynamic Characterization of MEMS Devices Using Advanced Optical Measurement Techniques

Heinrich Steger, Markus Heilig, Eric Lawrence and David Oliver of Polytec Inc. discuss testing MEMS Dynamics and the Challenges and Requirements therein, including types of tests and properties tested using strobe video microscopy, white light interferometry, digital holographic microscope, and laser Doppler vibrometry. Future challenges are also covered. From SEMICON Southeast Asia 2018 in May at Kuala Lumpur, Malaysia.

Keywords: MEMS, Characterization, Laser, RF, Optical, Sensors, SAW