SEMICON Europa 2017: Providing Key Process Enabling Vacuum Capability Through Integrated Sub-Fab Data Management

Erik Collart, Global Product Manager at EdCentra of EDWARDS, discusses the importance of vacuum and ambient quality in the chip manufacturing process, and the enablement of manufacturing through critical sub fab systems. Additionally, integration of sub fab equipment data, equipment maintenance data, and equipment fault analysis data to improve maintenance priorization via Machine Learning is covered. From SEMICON Europa, November 2017 in Munich, Germany.

Keywords: Fabrication, Vacuum, Machine Learning