SEMICON Europa 2017: Meeting the Increased Demand for 200 mm Capacity by Enhancing Capital Efficiency and Fab Productivity for IoT Applications

David Haynes, Ph.D., Senior Business Development Director of Lam Research Corporation addresses IoT challenges from a capital equipment perspective and offers strategies for reducing defectivity, enhancing productivity, and improving capital efficiency. Additionally, Throughput Optimization (TPO), Automated Preventative Maintenance, Wet Clean Optimization, and Diagnostics to Chamber Matching are covered. From SEMICON Europa, November 2017 in Munich, Germany.

Keywords: Internet of Things, Fabrication, Optimization, Automation, Defects, Throughput, Capacity