SEMICON Europa 2017: Measurement of Airborne Nanoscale Particles Using Condensation Particle Counters

Richard Remiarz, Business Director of Controlled Environments at TSI Incorporated, discusses market needs, limits in light-scattering instruments, CPC technology and its history, water-based CPCs, and performance data. From SEMICON Europa in November 2017 in Munich, Germany.

Keywords: CPC