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Voltage Sag Workshop for Manufacturing Fabs Overview

By Mark Stephens, EPRI, TF Leader, and Laura Nguyen, SEMI

Recently, SEMI & Electric Power Research Institute (EPRI) virtually held a four-hour workshop on April 21, 2021, on the perspectives from stakeholders on a persistent and difficult issue in microelectronics manufacturing - uncertain power quality. Nearly 100 participants attended the workshop with speakers from Advanced Energy, ASML, Austin Energy, EPRI, HP, National Grid, Schneider Electric, and VELCO.

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SEMI F47, Specification for Semiconductor Processing Equipment Voltage Sag Immunity, widely adopted across the industry, is the governing standard that defines voltage sag test levels and requirements for semiconductor tools. Since the implementation of SEMI F47, the vulnerability of semiconductor manufacturing to single-phase and two-phase voltage sags has improved greatly. However, semiconductor manufacturers continue to experience significant product loss and downtime due to voltage sag events. Given the ongoing issues with semiconductor plant downtime, a new SEMI Voltage Sag Immunity Task Force was formed to take a fresh look at the issue. They key objectives of this task force are to:

  • Review the characteristics of the power quality events that are still causing semiconductor plant process downtime.
  • Take a new look at the sensitivities in the process equipment.
  • Determine any potential adjustments to equipment design, facility design, utility systems, or SEMI Standards to further reduce voltage sag induced losses by the semiconductor industry.
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As work on SEMI Standard F47 continues, the workshop revealed perspectives from the key stakeholder segments to guide the audience in the overall efforts and progress of the task force.

The recording of the Voltage Sag Workshop for Manufacturing Fabs is now available on-demand. Complimentary access is available for SEMI Members.

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

If you are Tool or Component OEM and want to participate to understand how to improve your performance to various Single-Phase (Type I),Two-Phase (Type II), and Three Phase (Type III) voltage sags, we want you to join the Task Force and work with us to get the tool tested. Use this opportunity to make your equipment more robust to voltage sags!

If you are a Semiconductor Fab and you are interested in participating in the effort by supplying PQ data and tool downtime information, we welcome you to join and work with us. Make this effort known to your Electric Utility!

If you are an Electric Utility and you have Semiconductor Fabs in your Territory, join the Task Force and consider supporting the related EPRI Research project “System Compatibility Requirements for the Semiconductor Industry”.

To attend these meetings, you must be a SEMI Standards Program Member. Make sure your company influences the development of Standards critical to the industry! Become a SEMI Standards Program Member at  www.semi.org/standardsmembership.

To join the task force as a participating member, register to be a SEMI Standards Program Member above and e-mail Mark Stephens at EPRI, and Laura Nguyen at SEMI.

 

Standards Watch
SEMI
www.semi.org
June 3, 2021