Numerous sensors are based on the piezoelectric effect and AlN is the material of choice for the functional layer(s) in their design. As doping with Sc for contents up to 40at% increases the piezoelectric response(s) significantly, this entire span of compounds was characterized and the respective HW and processes are developed and ready to use. The most important figures of merit (FOM) for different applications are introduced and supported by measured results achieved using Evatec’s sputter technology.
John Micahels PVD production solution for highly Sc-doped AlN Intel [email protected] John Micahels Intel [email protected] CTO Brewer Science
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