Busch Vacuum Solutions has launched the COBRA BC 1200 A, adding to large portfolio of vacuum pumps for the Semiconductor market. This water-cooled dry vacuum pump is ideal for processes that benefit from low gas temperatures inside the pump. The low 65°C internal gas temperature minimizes build-up inside the mechanism while pumping ALD precursors that react more aggressively as gas temperatures inside the pump rise.
Many new ALD process tools require more pumping speed. The VFD-controlled integrated vacuum booster provides deep ultimate pressure and up to 1200 m3/h peak pumping speed to meet this need.
The COBRA BC 1200 A is well suited for clean, light and medium semiconductor applications like Lithography, Physical Vapor Deposition Process (PVD), PVD-pre-clean and rapid thermal annealing (RTA).
In addition to high performance, the COBRA BC 1200 A offers low cost of ownership, minimal maintenance with long service intervals, high uptime and direct water-cooling. The vacuum pump’s canned water-cooled motor and direct-mounted booster result in a small footprint and low overall height while retaining performance benefits.
The COBRA 1200 A vacuum pump is based on the proven screw vacuum technology from Busch. Dry, non-contacting patented self-balancing screws and idle mode enhance energy efficiency. The vacuum pump’s canned water-cooled motors and direct water-cooling limit dust contamination in clean room air and minimize height and footprint while retaining the performance benefits of this new pump.
US Marketing
Jean Perry – November 13, 2020
